Patent
Laser processing device
Sung Jin Woo
- 12 Jan 2017
TL;DR: In this article, a laser processing device consisting of a light source emitting a processing beam for laser-processing a subject to be processed, a light-collecting optical system lightcollecting the processing beam; and an auto-focusing unit adjusting the position of the light collecting optical system so that the focusing point of the processing point is formed inside the subject to being processed.
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Abstract: A laser processing device is disclosed. The disclosed laser processing device comprises: a light source emitting a processing beam for laser-processing a subject to be processed; a light-collecting optical system light-collecting the processing beam; and an auto-focusing unit adjusting the position of the light-collecting optical system so that the focusing point of the processing beam is formed inside the subject to be processed. The auto-focusing unit comprises: a first beam splitter which is provided between the light-collecting optical system and the light source, and reflects at least one portion of a reflected beam reflected from the subject to be processed; a first lens unit which focuses the reflected beam reflected from the first beam splitter; and a first optical sensor which is provided in the direction from the first lens unit where the reflected beam is focused, and which measures the energy density of the reflected beam focused by the first lens unit.
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Kyu Dong Sung
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