Laser processing apparatus

Patent

Laser processing apparatus

- 29 Mar 2012

4

TL;DR: In this article, a laser processing apparatus is provided with a first radiation means (31), which radiates a first laser beam (L1) for processing a subject to be processed; a second radiation mean (21, 21, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 14, 15, 16, 17, 18, 19, 20, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 34, 33, 35, 36, 38, 39

Abstract: A laser processing apparatus (1) is provided with: a first radiation means (31), which radiates a first laser beam (L1) for processing a subject to be processed; a second radiation means (21), which radiates a second laser beam (L2); a first light collecting means (33), which performs processing by forming, on the front surface (S1) or the rear surface (S2) of the subject to be processed, a first light collected area (F1), which is an area where the first laser beam is collected; a second light collecting means (24), which forms, at a predetermined position on the subject to be processed, a second light collected area (F2) where the second laser beam is collected; a light receiving means (26), which receives reflected light (L3) of the second laser beam that is reflected by the subject to be processed; focus servo means (27, 24a), which determine the position of the second light collected area on the basis of the reflected light of the second laser beam, said reflected light being received by the light receiving means; and a control means (33a), which controls the operation of the first light collecting means such that the first light collected area is formed at a position determined on the basis of the position of the second light collected area The numerical aperture of the first light collecting means is larger than that of the second light collecting means

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References

Patent

Laser processing device

Koji Kuno, +3 more

- 26 Sep 2007

TL;DR: In this paper, the authors present a laser condensing optical system which includes a laser beam source, a condensing system which is arranged between the beam source and a medium and condenses the laser beam in the medium, and a laser divergence point moving unit, which can move the position of the divergence point along an optical axis of the beam along with the refractive index.

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77

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Manufacturing method for surface conduction electron emitting element and manufacture thereof

Masahiro Tagawa, +1 more

- 13 Mar 1995

TL;DR: In this paper, a position control mechanism was used to adjust a focal point against the surface of a conduction electron emitting element based on information on the surface irregularities of the conductive thin film.

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11

Patent

Laser processing apparatus and laser processing method

Kenji Furuta, +1 more

- 04 Aug 2009

TL;DR: In this article, a laser processing apparatus including a holding unit for holding a workpiece, a processing unit for applying a laser beam to the workpiece held by the holding unit, a surface displacement detecting unit for detecting surface displacement, and a focal position adjusting unit for adjusting the position of a focusing lens provided in the processing unit according to the surface displacement detected.

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Satoru Kubota, +1 more

- 25 Dec 1992

TL;DR: In this article, a machining head 20 of a laser beam machine has a working part 40 and a range finding part 80, where the laser light beam sent from a laser oscillator 10 is separated to a laserbeam light R1 for machining and a laser beacon light R2 for range finding, and a condensing lens 48, focusing at the upper surface of a work 300 on a table 30 and then machining a work.

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