Patent
Laser machining device
Masahiko Sakamoto,Shozui Takeno,Yasuhiko Iwai,Toshiyuki Hokodate,Miki Kurosawa +4 more
- 13 Mar 2012
114
TL;DR: In this paper, a laser machining device with a laser oscillator for generating a laser beam, a main deflecting galvannometer mirror, an Fθ lens, and a sub-deflecting means arranged in an optical path between the laser oscillators and the main galvanometer mirror is described.
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Abstract: A laser machining device according to the invention is provided with a laser oscillator for generating a laser beam, a main deflecting galvannometer mirror, an Fθ lens, and a sub-deflecting means arranged in an optical path between the laser oscillator and the main deflecting galvanometer mirror. A means for splitting a laser beam is provided, and the sub-deflecting means is inserted into the optical path of one of the split laser beams. At the same time, both the split laser beams are incident from the same main deflecting galvannometer mirror to the Fθ lens, and a numerical aperture in the optical system constituted by the main deflecting galvannometer mirror, the Fθ lens, and an object is set to be not more than 0.08.
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Citations
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Tamami Takahashi,Mitsuhiko Shirakashi,Kenya Ito,Kazuyuki Inoue,Kenji Yamaguchi,Masaya Seki +5 more
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Energy efficient, laser-based method and system for processing target material
Donald V. Smart
- 19 Dec 2000
TL;DR: In this article, an energy-efficient method and system for processing target material such as microstructures in a microscopic region without causing undesirable changes in electrical and/or physical characteristics of material surrounding the target material is provided.
234
Patent
Laser beam processing machine
Satoshi Kobayashi,Keiji Nomaru,Yosuke Watanabe +2 more
- 25 Jan 2006
TL;DR: In this paper, a laser beam processing machine comprising a path distribution means for distributing a pulse laser beam oscillated by pulse laserbeam oscillation means to a first path and a second path alternately, and one laser beam that passes through one of the paths and is converged by one condensing lens and the other laser beam is applied at different focusing points which have been displaced from each other in the direction of the optical axis.
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Methods and systems for thermal-based laser processing a multi-material device
James J. Cordingley,Jonathan S. Ehrmann,David M. Filgas,Shepard D. Johnson,Joohan Lee,Donald V. Smart,Donald J. Svetkoff +6 more
- 07 Nov 2006
TL;DR: In this article, a method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided.
147
References
Patent
Ultrashort pulsed laser micromachining/submicromachining using an acoustooptic scanning device with dispersion compensation
Bryan Kok Ann Ngoi,Krishnan Venkatakrishnan +1 more
- 05 Jul 2001
TL;DR: In this paper, a method and apparatus for precision laser scanning suitable for precision machining or cleaning using an ultrashort pulsed laser beam is described, which employs a laser source, a dispersion compensation scanner, and a focusing unit.
95
Patent
Multiple split-beam laser processing apparatus generating an array of focused beams
Nobuaki Furuya,Gen Oda,Kouki Ichihashi +2 more
- 26 Oct 1993
TL;DR: In this paper, the optical fibers are shaped such that they have a sufficiently large value of minimum radius of curvature to ensure that a small angle of divergence is maintained for each of the beams emitted from the fibers, thereby ensuring that the converging lenses can be small and inexpensive.
91
Patent
Laser machining system for sequential irradiation of machining points
Kazuo Ota
- 26 May 1998
TL;DR: In this article, a laser machining system for machining a plurality of different machining spots on a work, which comprises a laser oscillator for generating laser light, a laser light scanner for deflecting the laser light generated from the laser oscillators so as to sequentially irradiate the laser lights to the plurality of variable machining points on the work, and an irradiation time setting member for determining previously a laser irradiation times to machining one machining spot in one operation.
46
Patent
Laser beam machining apparatus using a plurality of galvanoscanners
Keiji Iso,Takashi Kuwabara +1 more
- 10 Feb 1998
TL;DR: In this article, a reflection mirror is used to divide the laser beam into two split laser beams, and workpieces are simultaneously processed by the use of the split laser beam, workpieces (17a, 17b) were simultaneously processed.
43