Patent
Laser beam machine
Tanaka Eiichiro
- 02 Mar 1999
12
TL;DR: In this paper, a laser beam machine equipped with an auto-focusing function was designed to obtain an accurate focal point despite the displacement of the optical system of a machining laser or auto focus.
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Abstract: PROBLEM TO BE SOLVED: To provide a laser beam machine capable of obtaining an accurate focal point despite of the displacement of the optical system of a machining laser or auto focus on account of change in the ambient temperature of the device SOLUTION: The laser beam machine 31 is equipped with an auto-focusing function and designed to machine a work 16 on a stage 17-19 by means of a machining laser beam 1 The machine is also provided with a thermometer 22 for detecting the temperature of the optical system of the machining laser 1 or the auto focus 12, a main controller 8 having an arithmetic part for determining a defocus quantity based on the temperature detected by the thermometer using the map of temp vs defocus quantity, and a stage controller 9 having such a function that this defocus quantity is given to the Z stage 18 as an offset quantity Consequently, according to the temperature of the optical system detected by the thermometer 22, the defocus quantity is determined on the basis of this temperature from the map of temperature versus defocus quantity to give this defocus quantity to the Z stage 18 as the offset quantity
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Citations
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TL;DR: In this article, the energy distribution in the short-side direction of a rectangular laser beam applied to an amorphous semiconductor film (amorphous silicon film) is uniformized.
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TL;DR: In this paper, the incident angle and intensity of a laser beam 1 entering a large-sized lens (projection lens 30 ) of a short-axis condensing optical system, which is provided on the rear side, are changed for every shot by performing laser irradiation while shortaxis lens arrays 26 a and 26 b are reciprocated in a direction corresponding to a short axial direction of a linear beam (Y-direction).
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- 12 Apr 2001
TL;DR: In this article, a micro machining work is irradiated with a femtosecond laser beam and the work is fixed at a focus position with a minimum laser beam intensity given on the basis of the detected output of the third optical detector 67C.
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