Patent
Highly sensitive flow sensor
Young Cheol Chae,Kiseok Chang,Sangwoo Lee,Sung Pil Ryu,Jong Hyun Ahn,Yong June Lee +5 more
- 16 May 2019
TL;DR: In this article, a flow sensor consisting of first and second heaters which are disposed in an active layer formed on a silicon layer while being spaced apart from each other, so as to generate heat, is presented.
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Abstract: The present invention relates to a highly sensitive flow sensor. The flow sensor comprises: first and second heaters which are disposed in an active layer formed on a silicon layer while being spaced apart from each other, so as to generate heat; a temperature sensor which is disposed between the first and second heaters in the active layer so as to detect the difference between temperatures at both ends thereof and convert the same into a voltage signal; and a control circuit which is formed in the active layer so as to transmit, to the first and second heaters, a feedback signal of the voltage signal received from the temperature sensor, wherein the control circuit comprises an electrical filter for receiving, as an input signal, the voltage signal from the temperature sensor and increasing, through filtering, the order of a signal output therefrom.
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References
Patent
Thermal type flowmeter
Ito Akihiro,Seko Yoshitsugu,Hayashimoto Shigeru,Kitagawa Akiichi +3 more
- 09 Jul 2003
TL;DR: In this paper, the authors proposed a thermal flowmeter in which measurement output is prevented from being affected by the incident angle of a fluid, and internal leakage can be prevented by forming an elbow part with a bent at 90° angle for communicating a flow passage space with an inlet flow passage.
15
Patent
Thermal isolation between heating and sensing for flow sensors
Richard W. Gehman,Michael G. Marchini,Martin G. Murray +2 more
- 08 Dec 2005
TL;DR: In this article, an air gap can be formed between each sensor chip among the plurality of flow sensor chips, where each flow sensor chip is separated from one another by the air gap formed there between in order to reduce output distortion, response time, warm-up time, drift and noise associated with the plurality.
13
Patent
Flexible, self-rolled superficial flow sensor
Jianzhong Zhu,Hilary Bart-Smith,Carl White +2 more
- 18 Nov 2016
TL;DR: A superficial flow sensor may include a substrate; a thin film with a self-rolled portion, a stationary portion, and a free ribbon portion; an embedded strain gauge circuit; and at least one contact pad as mentioned in this paper.
4
Patent
Gas flow rate measuring arrangement
Keiji Hanzawa,Keiichi Nakada,Tadao Saito,Satoshi Shimada,Izumi Watanabe,Akio Yasukawa,圭一 中田,彰夫 保川,恵二 半沢,嶋田 智,直生 斉藤,渡辺 泉 +11 more
- 13 Jul 2005
TL;DR: In this article, a gas flow rate measuring arrangement capable of suppressing the characteristic variation such as sensitivity, response by reducing stress transmission to a resister on a diaphragm without accompanying cost rise is proposed.
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