Patent
Force sensor array having magnetostrictive magnetoresistive sensors and method for determining a force
Eckard Dr. Quandt,Manfred Ruehrig,Stephan Schmitt,Bernhard Winkler,J. Wecker,Juergen Zimmer +5 more
- 07 Mar 2006
16
TL;DR: In this paper, a force sensor has a layer sequence for determining a force acting on the layer sequence along a predefined force axis, which includes, arranged successively in a vertical direction, a first magnetic layer with a first magnetization direction.
read more
Abstract: The invention relates to a force sensor having a layer sequence for determining a force acting on the layer sequence along a predefined force axis. The layer sequence includes, arranged successively in a vertical direction, a first magnetic layer with a first magnetization direction, a separating layer and a second magnetic layer with a second magnetization direction. Here, the first magnetization direction is secured with respect to the layer sequence. The second magnetic layer has a magnetostriction constant that is different from zero and a uniaxial magnetic anisotropy with an anisotropy axis. The uniaxial magnetic anisotropy is generated using shape anisotropy. The second magnetization direction encloses an angle of more than 0° and less than 90° with the force axis in the quiescent state, and the anisotropy axis encloses an angle of more than 0° and less than 90° with the force axis.
read more
Chat with Paper
AI Agents for this Paper
Find similar papers on Google Scholar, PubMed and Arxiv
Write a critical review of this paper
Analyze citations of this paper to find unaddressed research gaps
Citations
Patent
Pressure sensor and microphone
Hideaki Fukuzawa,Akihiko Enamito,Osamu Nishimura,Michiko Hara,Hiromi Yuasa,Yoshihiko Fuji,Masayuki Kii,Eizo Fujisawa +7 more
- 28 Dec 2012
TL;DR: In this paper, a pressure sensor includes a base, and a first sensor unit, which includes a first transducer thin film, a first strain sensing device and a second strain sensing devices.
29
Patent
Pressure sensor, acoustic microphone, blood pressure sensor, and touch panel
Yoshihiko Fuji,Kei Masunishi,Hideaki Fukuzawa,Yoshihiro Higashi,Michiko Hara,Akio Hori,Tomohiko Nagata,Shiori Kaji,Akiko Yuzawa +8 more
- 05 Mar 2014
TL;DR: In this paper, a pressure sensor includes a film part and a sensing unit, and the sensing unit includes sensing elements provided on a portion of the film surface overlapping the first region, each sensing element includes a first, second magnetic layers and a spacer layer.
26
Patent
Pressure sensor, microphone, blood pressure sensor, and touch panel
Hideaki Fukuzawa,Yoshihiro Higashi,Yoshihiko Fuji,Michiko Hara,Akio Hori,Shiori Kaji,Tomohiko Nagata,Akiko Yuzawa +7 more
- 07 Oct 2013
TL;DR: In this paper, a pressure sensor includes a base unit, a film unit, and a plurality of sensing elements, each of which has a shape anisotropy characterized by a length of the first side being longer than the second side intersecting the first.
22
Patent
Magnetic film sensor and method of manufacturing the same
Yoshitaka Sasaki,Koji Shimazawa,Tatsushi Shimizu +2 more
- 24 Oct 2006
TL;DR: A magnetic film sensor comprises a magnetic film for generating magnetostriction, and a magnetostrictive structure for generating a magnetstriction in the magnetic film as discussed by the authors, which is constructed so as to generate a magnetization by curving the magnetic films, for example.
20
Patent
Strain and pressure sensing device, microphone, method for manufacturing strain and pressure sensing device, and method for manufacturing microphone
Fukuzawa Hideaki,Ohguro Tatsuya,Akihiro Kojima,Sugizaki Yoshiaki,Mariko Takayanagi,Yoshihiko Fuji,Akio Hori,Michiko Hara +7 more
- 28 Jun 2012
TL;DR: In this paper, a strain and pressure sensing device includes a semiconductor circuit unit and a sensing unit, which includes a movable beam, a strain sensing element unit, and first and second buried interconnects.
16
References
Patent
Sensor device having a magnetostrictive force sensor
Manfred Dr. Rührig,Joachim Wecker,Alfred Ludwig,E. Quandt,M. Löhndorf +4 more
- 29 Apr 2004
TL;DR: In this article, a sensor device having a magnetostrictive force sensor is provided, where the sensor device contains a TMR force sensor element having a magnetic detection layer of material having the magnetostriction coefficient λ≧|5·10−6|, a magnetically harder reference layer, and a tunnel barrier disposed between these layers.
38
Patent
Atomic force microscope system with cantilever having unbiased spin valve magnetoresistive strain gauge
Bruce A. Gurney,Harry Jonathon Mamin,Daniel Rugar,Virgil Simon Speriosu +3 more
- 02 Sep 1997
TL;DR: In this article, an atomic force microscope (AFM) uses a spin valve magnetoresistive strain gauge formed on the AFM cantilever to detect deflection of the cantilevers.
32
Patent
Magnetically sensitive component used as a sensor element operating according to a spin-valve principle in vehicles comprises two magneto-resistive layer systems with a reference layer, an intermediate layer and a detection layer
Gunther Haas,Martin Freitag,Andrew Johnson +2 more
- 15 Oct 1999
TL;DR: In this paper, two magneto-resistive layer systems are connected as bridge resistors in an electrical circuit in the form of a Wheatstone bridge, and at least one of the reference layers has a first partial layer and a second partial layer, the first layer having a magnetization (m2) and the second layer being an antiferromagnetic partial layer.
13
Patent
Strain or pressure sensor based on a tunnel magnetoresistive (TMR) element in which a magnetostrictive layer is arranged on one side of an oxide layer so that strain induced anisotropies cause a relatively large resistance change
Eckhard Quandt,Markus Loehndorf,Alfred Ludwig,Manfred Ruehrig,Joachim Wecker +4 more
- 04 Apr 2002
TL;DR: In this article, a strain sensor for measurement of mechanical length alterations comprises a sandwich system with two planar electrodes separated by an oxide barrier that acts as a tunnel barrier, and a current flow takes place through the barrier.
8
Patent
Force sensing device having magnetized element and magneto electric material
Akio Takada,Minoru Ikarashi +1 more
- 13 Feb 2003
TL;DR: In this article, the authors proposed a force sensing device having a magneto electric material and a magnetic element moveable relative to the magnetic field in response to an applied force, where the magnetic element has a magnetisation direction parallel to the direction of the movement.
2