Journal Article10.1088/0960-1317/10/2/307
Ferroelectric thin films for micro-sensors and actuators: a review
TL;DR: In this article, the authors present a review of the deposition, integration, and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems.
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Abstract: This paper reviews deposition, integration, and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are presented. A summary of the published data on the piezoelectric properties of PZT thin films is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented.
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Citations
Film Thickness Dependence of Crystal Structure in 100-Oriented Epitaxial Pb(Zr$_{0.65}$Ti$_{0.35}$)O$_{3}$ Films Grown on Single-Crystal Substrates with Different Thermal Expansion Coefficients
TL;DR: The out-of-plane/in-plane lattice parameter ratio of the films on the CaF2 substrates was larger than that on the SrTiO3 substrates up to 1.1 µm film thickness, while (90°-α) (α was defined as the internal tilt angle) was almost 0°.
8
Magnetic Force Based Resonant Magnetic Field Sensor With Piezoelectric Readout
TL;DR: In this article, a prototype resonant magnetic field sensor utilizing piezoelectric excitation and detection with ferromagnetic film at the free end of micro-cantilever for magnetic field detection is presented.
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Top electrode size effects in the piezoresponse force microscopy of piezoelectric thin films attached to a rigid substrate
TL;DR: In this article, the surface displacement, electric potential inside the film, electric charge and effective piezoelectric coefficient are expressed as a set of integral equations for two limiting cases, i.e., half space (HS) and infinitely thin film (IT).
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Nonlinear electric field dependence of the transverse piezoelectric response in a (001) ferroelectric film
Yingying Wang,Yingying Wang,Hongbo Cheng,Hongbo Cheng,Hongbo Cheng,Jing Yan,Ning Chen,Peng Yan,Jun Ouyang,Jun Ouyang +9 more
TL;DR: In this article, the authors used a small field e31,f test under a sweeping direct current bias voltage, in which the field-dependent transverse piezoelectric response of a (001)-film is analyzed in a stepwise manner.
8
•Dissertation
Conception, réalisation et caractérisation de biocapteurs micromécaniques résonants en silicium avec actionnement piézoélectrique intégré : détection de l'absorption de nanoparticules d'or
Matthieu Guirardel
- 01 Jan 2003
TL;DR: In this paper, le methode de detection est basee sur la variation de frequence de resonance d'un micro-dispositif mecanique, in which the surface is fonctionnalisee for adsorber le compose a mesurer.
8
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TL;DR: In this article, the normal load method is used to measure the coefficients for PZT thin films with various compositions prepared by the solgel technique or by organometallic chemical vapor deposition (OMCVD).
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Jonathan J. Bernstein,S. Finberg,K. Houston,L.C. Niles,H.D. Chen,L. E. Cross,K. Li,K. Udayakumar +7 more
TL;DR: In this article, a ferroelectric monomorph sonar transducers have been built using sol-gel PZT on micromachined silicon wafers and tested in water in the frequency range of 0.3 to 2 MHz.
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