Journal Article10.1088/0960-1317/10/2/307
Ferroelectric thin films for micro-sensors and actuators: a review
TL;DR: In this article, the authors present a review of the deposition, integration, and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems.
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Abstract: This paper reviews deposition, integration, and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are presented. A summary of the published data on the piezoelectric properties of PZT thin films is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented.
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Citations
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RF magnetron sputtered La3+-modified PZT thin films: Perovskite phase stabilization and properties
TL;DR: In this paper, the authors reported the preparation of lanthanum-modified lead zirconate titanate (PLZT) thin films in pure perovskite phase by RF magnetron sputtering.
14
Integration of a Piezoelectric Layer on Si FinFETs for Tunable Strained Device Applications
TL;DR: In this article, the authors analyzed the practical realization of such PiezoFETs comprising a piezoelectric stressor layer, lead-zirconate-titanate (PZT), and aluminum-nitride (AlN) deposited on n-type silicon FinFET.
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Fabrication of stabilized piezoelectric thick film for silicon-based MEMS device
Taeyun Kwon,Taeyun Kwon,Yong Bum Kim,Kilho Eom,Dong Sup Yoon,Dong Sup Yoon,Hong Lim Lee,Tae Song Kim +7 more
TL;DR: In this paper, the authors investigated the electrical properties of piezoelectric thin films with controlled microstructure and showed that a BNP thin film exhibits the densest homogeneous microstructures.
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Unlocking AlN Piezoelectric Performance with Earth‐Abundant Dopants
Jacob Startt,Mohammed Quazi,P. B. Sharma,Irma Rocio Vazquez,Aseem Poudyal,Nathaniel Jackson,Rémi Dingreville +6 more
TL;DR: In this paper , ab initio calculations are combined with targeted fabrication and experimentation to identify alternative earth-abundant dopants for AlN from the periodic table d-block, and it is found that group IVB metals, titanium, zirconium, and hafnium induce large piezoelectric enhancements comparable to Sc.
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TL;DR: In this article, the normal load method is used to measure the coefficients for PZT thin films with various compositions prepared by the solgel technique or by organometallic chemical vapor deposition (OMCVD).
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Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding
Paul Muralt,Thomas Maeder,Laurent Sagalowicz,Stephane Hiboux,Silvia Scalese,D. Naumovic,Raffaele Giuseppe Agostino,N. Xanthopoulos,Hans Jörg Mathieu,L. Patthey,E. L. Bullock +10 more
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Micromachined high frequency ferroelectric sonar transducers
Jonathan J. Bernstein,S. Finberg,K. Houston,L.C. Niles,H.D. Chen,L. E. Cross,K. Li,K. Udayakumar +7 more
TL;DR: In this article, a ferroelectric monomorph sonar transducers have been built using sol-gel PZT on micromachined silicon wafers and tested in water in the frequency range of 0.3 to 2 MHz.
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