Journal Article10.1088/0960-1317/10/2/307
Ferroelectric thin films for micro-sensors and actuators: a review
TL;DR: In this article, the authors present a review of the deposition, integration, and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems.
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Abstract: This paper reviews deposition, integration, and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are presented. A summary of the published data on the piezoelectric properties of PZT thin films is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented.
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Citations
Atomic layer deposition of PbZrO3 thin films
TL;DR: In this article, the preparation of lead zirconate films using atomic layer deposition was reported, in which tetraphenyl lead (Ph4Pb) was used as the lead and Zirconium 2,2,6, 6,6-tetramethyl-3,5-heptadionato (Zr(thd)4)4), while ozone was used to provide oxygen source.
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Parameter extraction from BVD electrical model of PZT actuator of micropumps using time-domain measurement technique
TL;DR: In this paper, the authors presented a novel time-domain measurement technique for extracting the parameters of a BVD electrical model describing a PZT actuator of the micropump excited by a square pulse with a relatively high voltage and low frequency.
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Towards low-temperature deposition of piezoelectric Pb(Zr,Ti)O 3 : Influence of pressure and temperature on the properties of pulsed laser deposited Pb(Zr,Ti)O 3
TL;DR: In this paper, the influence of deposition pressure and temperature on structural properties as well as on dielectric and piezoelectric properties of PZT thin films is investigated.
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Improvement in fatigue property for a PZT ferroelectric film device with SRO electrode film prepared by chemical solution deposition
TL;DR: PZT films with spin coating using the chemical solution deposition (CSD) method on an SRO/Si or a Pt/Ti/SiO 2 /Si substrate were prepared by spin coating as discussed by the authors.
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Design, modeling and fabrication of piezoelectric micromachined ultrasonic transducers
B. Belgacem,F. Calame,Paul Muralt +2 more
- 18 Sep 2005
TL;DR: An analytical model based on the clamped plate theory has been used to design the Bimorph pMUT (i.e. frequency) in this paper, which gives a good prediction of the experimental frequency of the 5-layers PMUT plate resonance.
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References
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TL;DR: In this article, the authors studied the dielectric properties, lattice and microstructure of ceramic BaTiO3 showing grain sizes of 0.3-100 μm and showed that at grain sizes <10 μm the width of ferroelectric 90° domains decreases proportionally to the square root of the grain diameter.
Effect of Mechanical Boundary Conditions on Phase Diagrams of Epitaxial Ferroelectric Thin Films
TL;DR: In this paper, a phenomenological thermodynamic theory of ferroelectric thin films epitaxially grow on cubic substrates is developed using a new form of the thermodynamic potential, which corresponds to the ac tual mechanical boundary conditions of the problem.
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Measurement of piezoelectric coefficients of ferroelectric thin films
K. Lefki,G. J. M. Dormans +1 more
TL;DR: In this article, the normal load method is used to measure the coefficients for PZT thin films with various compositions prepared by the solgel technique or by organometallic chemical vapor deposition (OMCVD).
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Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding
Paul Muralt,Thomas Maeder,Laurent Sagalowicz,Stephane Hiboux,Silvia Scalese,D. Naumovic,Raffaele Giuseppe Agostino,N. Xanthopoulos,Hans Jörg Mathieu,L. Patthey,E. L. Bullock +10 more
TL;DR: In this paper, the role of 1 to 5 nm thick seed layers for the growth of textured PbTiO3 and Pb(Zr, Ti)O-3 thin films on textured Pt(111) thin film substrates has been studied.
Micromachined high frequency ferroelectric sonar transducers
Jonathan J. Bernstein,S. Finberg,K. Houston,L.C. Niles,H.D. Chen,L. E. Cross,K. Li,K. Udayakumar +7 more
TL;DR: In this article, a ferroelectric monomorph sonar transducers have been built using sol-gel PZT on micromachined silicon wafers and tested in water in the frequency range of 0.3 to 2 MHz.
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