Journal Article10.1088/0960-1317/10/2/307
Ferroelectric thin films for micro-sensors and actuators: a review
TL;DR: In this article, the authors present a review of the deposition, integration, and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems.
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Abstract: This paper reviews deposition, integration, and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are presented. A summary of the published data on the piezoelectric properties of PZT thin films is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented.
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Citations
Mechanical-Resonance-Enhanced Thin-Film Magnetoelectric Heterostructures for Magnetometers, Mechanical Antennas, Tunable RF Inductors, and Filters.
Cheng Tu,Zhaoqiang Chu,Zhaoqiang Chu,Benjamin Spetzler,Patrick Hayes,Cunzheng Dong,Xianfeng Liang,Huaihao Chen,Yifan He,Yuyi Wei,Ivan Lisenkov,Hwaider Lin,Yuanhua Lin,Jeffrey McCord,Franz Faupel,Eckhard Quandt,Nian X. Sun +16 more
TL;DR: These integrated multiferroic devices are compact, lightweight, power-efficient, and potentially integrable with current complementary metal oxide semiconductor (CMOS) technology, showing great promise for applications in future biomedical, wireless communication, and reconfigurable electronic systems.
69
Use of Stress To Produce Highly Oriented Tetragonal Lead Zirconate Titanate (PZT 40/60) Thin Films and Resulting Electrical Properties
TL;DR: In this paper, the effects of stress from different platinized single-crystal substrates on film orientation and resulting electrical properties were studied, showing that films oriented in the 〈001〉 direction demonstrated lower dielectric constants and higher Pr and −d31 values than (111) films.
69
Experimental investigation of galloping piezoelectric energy harvesters with square bluff bodies
Felix Ewere,Gang Wang,Brian Cain +2 more
TL;DR: In this article, a galloping piezoelectric energy harvester (GPEH) with a square bluff body and an improved GPEH with an impact bump stop are tested in a wind tunnel in order to determine the system damping, electrical response and limit cycle oscillation (LCO) amplitude.
69
Adaptive vibration control of micro-cantilever beam with piezoelectric actuator in MEMS
TL;DR: In this article, the authors proposed a dynamical model and the governing equations of motion of the micro-cantilever beams based MEMS with piezoelectric actuator (PZT).
69
Dielectric and ferroelectric properties of highly (100)-oriented (Na0.5Bi0.5)0.94Ba0.06TiO3 thin films grown on LaNiO3/γ-Al2O3/Si substrates by chemical solution deposition
TL;DR: In this paper, a transparent and stable (Na 0.5 Bi 0.94 Ba 0.06 ) 0.6 TiO 3 precursor chemical solution has been achieved by using ethanolamine as a ligand of Ba 2+.
67
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TL;DR: In this article, the normal load method is used to measure the coefficients for PZT thin films with various compositions prepared by the solgel technique or by organometallic chemical vapor deposition (OMCVD).
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Micromachined high frequency ferroelectric sonar transducers
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TL;DR: In this article, a ferroelectric monomorph sonar transducers have been built using sol-gel PZT on micromachined silicon wafers and tested in water in the frequency range of 0.3 to 2 MHz.
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