Journal Article10.1088/0960-1317/10/2/307
Ferroelectric thin films for micro-sensors and actuators: a review
TL;DR: In this article, the authors present a review of the deposition, integration, and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems.
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Abstract: This paper reviews deposition, integration, and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are presented. A summary of the published data on the piezoelectric properties of PZT thin films is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented.
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Citations
Flexoelectric switching characteristics depending on crystallinity of highly c-oriented epitaxial SrBi2Nb2O9 thin film
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Polarity effects on wake‐Up behavior of Al0.94B0.06N ferroelectrics
Keisuke Yazawa,Daniel E. Drury,John Hayden,Jon Paul Maria,Susan Trolier-McKinstry,Andriy Zakutayev,Geoff L. Brennecka +6 more
TL;DR: This study investigates the wake-up behavior of Al0.94B0.06N ferroelectrics, revealing that domain-wall density and mobility increase with electric field cycle, driving the opening of polarization hysteresis loops and impacting device reliability.
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Measurement of piezoelectric coefficients of ferroelectric thin films
K. Lefki,G. J. M. Dormans +1 more
TL;DR: In this article, the normal load method is used to measure the coefficients for PZT thin films with various compositions prepared by the solgel technique or by organometallic chemical vapor deposition (OMCVD).
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Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding
Paul Muralt,Thomas Maeder,Laurent Sagalowicz,Stephane Hiboux,Silvia Scalese,D. Naumovic,Raffaele Giuseppe Agostino,N. Xanthopoulos,Hans Jörg Mathieu,L. Patthey,E. L. Bullock +10 more
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Micromachined high frequency ferroelectric sonar transducers
Jonathan J. Bernstein,S. Finberg,K. Houston,L.C. Niles,H.D. Chen,L. E. Cross,K. Li,K. Udayakumar +7 more
TL;DR: In this article, a ferroelectric monomorph sonar transducers have been built using sol-gel PZT on micromachined silicon wafers and tested in water in the frequency range of 0.3 to 2 MHz.
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