Proceedings Article10.1109/FREQ.2009.5168142
Enhancement of micromechanical resonator manufacturing precision via mechanically-coupled arraying
Yang Lin,Wei-Chang Li,Bongsang Kim,Yu-Wei Lin,Zeying Ren,Clark T.-C. Nguyen +5 more
- 20 Apr 2009
- pp 58-63
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TL;DR: In this article, a statistical comparison between the resonance frequency variations of stand-alone micromechanical disk resonators and mechanically-coupled array composites of them reveals that mechanically coupled arraying can very effectively enhance the manufacturing repeatability of resonance frequencies.
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Abstract: A statistical comparison between the resonance frequency variations of stand-alone micromechanical disk resonators and mechanically-coupled array composites of them reveals that mechanically-coupled arraying of on-chip micromechanical resonators can very effectively enhance the manufacturing repeatability of resonance frequencies. In particular, twenty 3-disk resonator array-composites on a single die achieve a measured resonance frequency standard deviation as small as 165.7 ppm around a 61.25 MHz average, which is significantly smaller than the 316.4 ppm measured for twenty stand-alone disk resonators on the same die. This new standard deviation reduces the expected filter percent bandwidth achievable with a 90% confidence interval without the need for trimming from the 1.89% of previous work to now just 0.86%. Larger arrays should further reduce the frequency standard deviation, perhaps to the point of allowing trim-free RF channel-select bandwidths with reasonable manufacturing confidence interval.
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Citations
Resonant Body Transistors in IBM's 32 nm SOI CMOS Technology
TL;DR: In this paper, an n-channel field effect transistor (FET) is used to localize acoustic vibrations in the unreleased CMOS-integrated MEMS resonators fabricated at the transistor level of IBM's 32SOI technology and realized without the need for any postprocessing or packaging.
A Vertically Coupled MEMS Resonator Pair for Oscillator Applications
TL;DR: In this paper, a vertically coupled (VC) CMOS-microelectromechanical systems (MEMS) resonator pair for phase noise reduction is presented. But the design concept of this design can be extended to three dimensional (3-D) mechanically coupled resonator designs in the future.
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Numerical Study of the Impact of Vibration Localization on the Motional Resistance of Weakly Coupled MEMS Resonators
TL;DR: In this paper, the impact of process-induced variations on the achievable motional resistance of 1D, 2D, cyclic, and cross-coupled architectures of weakly coupled electrostatically transduced microelectromechanical resonators operating in the 250-kHz range was studied.
A passband-corrected high rejection channel-select micromechanical disk filter
Mehmet Akgul,Clark T.-C. Nguyen +1 more
- 19 May 2014
TL;DR: In this article, a 39nm-gap capacitive transducer, voltage-controlled frequency tuning, and a stress relieving coupled array design has enabled a 0.09% bandwidth 223.4MHz channel-select filter with only 2.7dB of in-band insertion loss and 50dB of out-of-channel interferer rejection.
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RF Channel-Select Micromechanical Disk Filters—Part II: Demonstration
TL;DR: This Part II of a two-paper sequence presents fabrication and measurement results for a micromechanical disk-based RF channel-select filter designed using the theory and procedure of Part I, which compares well with predictions of an electrical equivalent circuit.
15
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