Journal Article10.35848/1882-0786/acbfa0
Effective electromechanical coupling coefficient ( keff2 ) enhancement of a Lamb wave resonator with trapezoid grooves configuration
Yuchen Fan,Jie Zhou,Qinwen Xu,Xin Tong,Ying Xie,Yang Zou,Jiaqi Ding,Chao Gao,Binghui Lin,Wenjuan Liu,Yan Liu,Yao Cai,Chengliang Sun +12 more
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TL;DR: In this article , a first-order Lamb wave resonator (LWR) with a trapezoid groove configuration on the top surface of the aluminum nitride membrane between interdigital electrodes is proposed.
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Abstract: A first-order ( S1 ) Lamb wave resonator (LWR) with a trapezoid grooves configuration on the top surface of the aluminum nitride membrane between interdigital electrodes is proposed in this paper. Both the simulation and experiment results demonstrate that the keff2 can be enhanced with the depth of the trapezoid grooves increasing. Meanwhile, the spurious modes can be suppressed by the trapezoid grooves. A 75% improvement on the keff2 has been achieved in a 2.45 GHz S1 mode LWR with trapezoid grooves with spurious modes free. The keff2 reaches up to 5.47% without quality factor degradation.
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Citations
Micromachined piezoelectric Lamb wave resonators: a review
Xianzheng Lu,Hao Ren +1 more
TL;DR: Micromachined piezoelectric Lamb wave resonators offer high-performance and miniaturized resonators with multiple vibration modes and lithographically defined frequencies. However, challenges such as degraded electrical and thermal properties of nanometer-scale electrodes and high thin film stress need further investigation to overcome.
Lamé-Mode Resonator with Trapezoidal Grooves Based on Sc<sub>0.3</sub>Al<sub>0.7</sub> N/AlN Composite Film Achieving Coupling Coefficient of 18.7%
Zhiyu Wang,Jiewei Jiang,Changqin Ma,Fengyuan Yang,Yiming Ma,Nan Wang +5 more
- 20 Oct 2023
TL;DR: Lamé-mode resonator with trapezoidal grooves based on Sc0.3Al0.7 N/AlN composite film achieves high coupling coefficient of 18.7%.
A Lamb Wave Resonator with Trapezoidal Interdigitated Electrodes
X. Chen,Yuanhang Qu,Tao Luo,Xiyu Gu,Xiaoming Huang,Yao Cai,Shishang Guo,Yan Liu,Chengliang Sun +8 more
- 13 May 2024
Low temperature coefficient of frequency AlN Lamb wave resonator using groove structure between interdigital transducers
Huanyun Li,Jie Zhou,Qinwen Xu,Zesheng Liu,Yuqi Ren,Yan Liu,Shishang Guo,Yao Cai,Chengliang Sun +8 more
TL;DR: Researchers propose a groove structure between interdigital transducers to improve temperature stability of AlN Lamb wave resonators, reducing temperature coefficient of frequency (TCF) by 61.7-75.5% through finite element method and theoretical analysis.
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