Patent
Direct tool loading
Anthony C. Bonora,Michael Krolak,Roger G. Hine +2 more
- 24 Feb 2005
153
TL;DR: In this article, the authors present a container transport and loading system that consists of a load port for presenting articles to a tool and a container transportation system, which is adapted to load and unload a container from a conveyor that passes by the load port and move the FOUP horizontally.
read more
Abstract: The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.
read more
Chat with Paper
AI Agents for this Paper
Find similar papers on Google Scholar, PubMed and Arxiv
Write a critical review of this paper
Analyze citations of this paper to find unaddressed research gaps
Citations
Patent
Semiconductor device, and manufacturing method thereof
Kengo Akimoto,Tatsuya Honda,Norihito Sone +2 more
- 01 Aug 2008
TL;DR: In this article, the oxide semiconductor film has at least a crystallized region in a channel region, which is defined as a region of interest (ROI) for a semiconductor device.
1.5K
Patent
Substrate Processing Apparatus
Tamami Takahashi,Mitsuhiko Shirakashi,Kenya Ito,Kazuyuki Inoue,Kenji Yamaguchi,Masaya Seki +5 more
- 16 Feb 2005
TL;DR: In this article, a bypass pipe is connected between the mechanical booster pump and the rest vacuum pumps located at a downstream side of the booster pump to prevent the exhaust gas from diffusing back to the inside of a process chamber.
644
Patent
Process feed management for semiconductor substrate processing
Fred Pettinger,Carl White,Dave Marquardt,Sokol Ibrani,Eric Shero,Todd Dunn,Kyle Fondurulia,Mike Halpin +7 more
- 28 Oct 2011
TL;DR: In this paper, a gas channel plate for a semiconductor process module is described, which includes a heat exchange surface including a plurality of heat exchange structures separated from one another by intervening gaps.
281
Patent
Method of forming insulation film by modified PEALD
Akiko Kobayashi,Akira Shimizu,Nobuyoshi Kobayashi,Woo Jin Lee +3 more
- 13 Nov 2009
TL;DR: In this paper, a method of forming an insulation film by alternating multiple times, respectively, a process of adsorbing a precursor onto a substrate and treating the adsorbed surface using reactant gas and a plasma, wherein a plasma is applied in the process of supplying the precursor.
215
Patent
Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
Eric Shero,Petri Räisänen,Sung-Hoon Jung,Chang-gong Wang +3 more
- 29 Dec 2011
TL;DR: In this paper, a process and system for depositing a thin film onto a substrate using atomic layer deposition (ALD) is described. But it is not shown how to apply ALD to a metal oxide layer.
203
References
Patent
Direct loadlock interface
Anthony C. Bonora,Joshua T. Oen +1 more
- 27 Feb 1995
TL;DR: A loadlock chamber for transferring one or more semiconductor wafers from a storage and transfer pod into high-vacuum process chambers in a contaminant free environment is described in this article.
172
Patent
Loading and unloading station for semiconductor processing installations
Andreas Mages,Werner Scheler,Herbert Blaschitz,Alfred Schulz,Heinz Schneider +4 more
- 13 Nov 2001
TL;DR: In this paper, a loading and unloading station for semiconductor processing installations is designed to ensure charging proceeding from transporting containers under clean room conditions, where the containers themselves serve as magazines for disk-shaped objects and are open laterally.
141
Patent
Integrated intra-bay transfer, storage, and delivery system
Anthony C. Bonora,Richard H. Gould,Michael D. Brain,David V. Adams +3 more
- 15 Dec 1999
TL;DR: In this article, an integrated intra-bay transfer, storage and delivery system for moving an article between a conveyor and a station such as a work station is described, which includes a transfer assembly that includes a lift mechanism and a displacement mechanism.
100
Patent
Method and apparatus for transferring articles between two controlled environments
Anthony C. Bonora,Gilles Guerre,Mihir Parikh,Frederick T. Rosenquist,Sudhir Jain +4 more
- 12 Sep 1991
TL;DR: In this article, a method and apparatus for transferring articles from a transportable container to a second container, for example, a processing station having a port which provides access to the interior region of the processing station.
99
Patent
Sealable transportable container having improved liner
Anthony C. Bonora,Robert P. Wartenbergh,Sudhir Jain,Mark R. Davis +3 more
- 14 Jan 1994
TL;DR: In this paper, an elastomer sealing material is integrally molded to the inner surface of a box door to form a first seal with the first sealing surface and a second sealing surface when the box door is moved in a sealing position with respect to the box.
96