Journal Article10.1016/S0924-4247(99)00384-2
Design, optimization and simulation on microelectromagnetic pump
93
TL;DR: In this article, a four-layer electromagnetic micropump was designed, and its static and dynamic characters were studied from elements to full system, and the mechanical model of the electromagnetic actuator was established, and some geometric structural parameters were then optimized.
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Abstract: A four-layer electromagnetic micropump was designed, and its static and dynamic characters were studied from elements to full system. The mechanical model of the electromagnetic actuator was established, and some its geometric structural parameters were then optimized. The deflection of the pump membrane caused by the varying local magnetic driving forces was analyzed in particular by ANSYS FEM. Fluid theory and experiment data were used to analyze the microvalve. Full system model of the micropump and its differential equations were set up on the basis of physical liquid transmission procedure and system function block. Pulse and periodic pulse driving current responses were evaluated. The flow-frequency characteristic shows that the most effective driving frequency is 125 Hz. The effect of driving signal duty cycle and microvalve flow resistance was studied. The transfer function of this full system of micropump was also discussed.
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References
Analytical static modelling and optimization of electrostatic micropumps
TL;DR: In this paper, a mechanical law with a simple elementary model of membrane deflection is used to demonstrate the static instability of such a system under electrostatic actuation and provide an analytical solution for the membrane position.
63
Electrofluidic full-system modelling of a flap valve micropump based on Kirchhoffian network theory
TL;DR: In this paper, the authors describe a methodology for setting up physically based consistent full-system models for the effort-economizing and yet accurate numerical simulation of microsystems and demonstrate its practicality with reference to an electrofluidic micropump macromodel.
60
Electrostatic actuation as a self-testing method for silicon pressure sensors
Adriana Cozma,Robert Puers +1 more
TL;DR: In this article, the authors investigated the possibility of using electrostatic forces to actuate the membrane of a pressure sensor in order to create self-testing features in the system and showed that the electrostatic pressure is small compared with the external pressure, unless large voltages or electrical charges are used.
23
Development of passive microvalves by the finite element method
TL;DR: This work is concerned with calculating the performance of such a microvalve and modifying its design so that instead of acting as an inlet valve, it functions as an outlet valve.
17
•Dissertation
Micromachined components as integrated inductors and magnetic microactuators
Chong Hyuk Ahn
- 01 May 1993
14