Control method for single crystal pulling-up device

Patent

Control method for single crystal pulling-up device

- 21 Feb 1990

1

TL;DR: In this article, the authors proposed a method to shorten the pulling-up time of a single crystal by switching over the process to the taking-up process from the automatic diameter control process when the change of the weight of single crystal is become zero.

Abstract: PURPOSE:To sharply shorten the pulling-up time of single crystal when a single crystal is pulled up in the liquid seal type pulling-up method by switching over the process to the taking-up process from the automatic diameter control process when the change of the weight of single crystal is become zero. CONSTITUTION:The crystal weight is measured by using a load cell 1 fixed to a pulling-up shaft, and the measured value is inputted to a weight differential circuit. The weight differential value obtained in this circuit is inputted to a discriminating circuit to compare it with a specified value K which is practically quite near to zero. When the differential value dw/dt is smaller than the specified value K, it is determined that the growth of the crystal is finished, and the determination signal is inputted from the discriminating circuit to a sequence circuit while input signal sent to a temp. control circuit is stopped, and, by the control operation through the sequence circuit, the single crystal is pulled up from the crucible and then a cooling process is started.

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Citations

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TL;DR: In this paper, an electrode structure for ozone production capable of maintaining current efficiency practically constant by applying a perfluorocarbonsulfonic acid type ion exchange resin to the surface of a solid electrolyte, exerting heating, and then disposing a lead oxide anode in a manner to be in close adhesion, to the above surface.

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References

Patent

Method for growing single crystal

Tanigawa Akio, +1 more

- 12 May 1988

TL;DR: In this article, the electron rays are projected onto the substrate surface in a manner that satisfy Bragg's reflection conditions with respect to one or plural crystal orientation of the single crystal layer of the above-mentioned substrate surface.

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4

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Key input device

Nishimori Montarou

- 02 Sep 1988

TL;DR: In this article, the authors proposed to confirm a depressed switch by outputting an analog voltage corresponding to a key switch from a voltage generating part and discriminating whether a single switch or plural switches are depressed, by varying the resistance value of a corresponding variable resistance circuit to a value corresponding to the switch by depressing either key switch.

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Patent

Process for growing compound semiconductor single crystal

Sato Takayuki

- 13 Feb 1986

TL;DR: In this article, the authors proposed a method to obtain a crystal of high quality having a diameter controlled with high precision over a whole range of the pulling of the crystal in the prepn. in over the whole stage from the beginning of pulling to the end of pulling.

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2