Patent
Clean room air filtering
Devon A. Kinkead,Robert W. Rezuke,John K. Higley +2 more
- 02 Dec 1993
105
TL;DR: In this paper, a clean room and a chemical air filter suitable for use in the air handling system of the clean room directly upstream of high efficiency particulate air (HEPA) filters are presented.
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Abstract: The invention features a clean room and a chemical air filter suitable for use in the air handling system of the clean room directly upstream of high-efficiency particulate air (HEPA) filters The chemical filter is of the pleated filter type comprising an air permeable, relatively thick web of non-woven fibrous carrier material of pleated form The web includes a matrix formed of a large multiplicity of synthetic fibers and is characterized in that activated carbon particles are distributed throughout the web, bound in the interstices of the matrix in a manner preventing loss to the air of particles in quantity substantially detrimental to the performance of the HEPA filter The activated carbon particles are of the type selected to remove the predetermined gas-phase contaminant from the air from the source The invention also features a non-off gassing filter casing that may easily be installed into existing clean room air handling systems
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Citations
Patent
Devices for removal of dimethyl sulfoxide (dmso) or related compounds or associated odors and methods of using same
Colette Cozean,Harvey L. Claussen +1 more
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TL;DR: In this article, the removal of dimethyl sulfoxide (DMSO) or related compounds, or odors associated with DMSO or DMS-related compounds are discussed.
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Use of modified active carbon to control pH excursions
Robert G. Roodman,Jack Smiley,J. Michael Havelka,Robert Scherrer +3 more
- 30 Nov 2001
TL;DR: In this article, an activated carbon and a carboxylic acid containing compound were used for purifying aqueous solutions by providing a bed of the activated carbon composition, and passing the purification solution through the bed.
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Electronics structure comprising at least one barrier impermeable to fine particles
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TL;DR: In this article, the authors define a barrier between an electrical and/or electronic (E&E) system and the frame of an electronics structure to isolate sensitive electrical and electronic components from fine particles such as dust dispersed outside the electronics structure.
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Gas filters for acidic contaminants
Chaoyi Ba,Weihua Zheng,Erich Diesel,James Langer,James Economy,Bita Vaezian,Xinyu He +6 more
- 26 Aug 2016
TL;DR: In this article, a substrate and a coating applied to the substrate is described. And the coating may include a basic reactant and a humectant, and may further include a preservative or a water-soluble polymer, and a sensor configured to sense an optical change in the coating.
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Methods for facilitating use of dimethyl sulfoxide (dmso) by removal of same, related compounds, or associated odors
Jesse Cozean,Colette Cozean,Efrain Gonzales,Stanley W. Jacob +3 more
- 02 May 2011
TL;DR: In this paper, the authors describe a method for removing compositions comprising dimethyl sulfoxide (DMSO) or related compounds, or odors associated with same, using activated carbon filters, adsorbents, odor adsorbing fabrics, masks, clean air members and clean air supply assemblies.
1
References
Patent
Melt-blown fibrous electrets
Donald A. Kubik,Charles I Davis +1 more
- 06 Feb 1978
TL;DR: In this paper, a persistent electric charge is introduced into melt-blown fibers during the melt-blowing process, and these charged fibers are incorporated into fibrous webs, they provide unique properties, including improved filtering properties.
353
Patent
Adsorptive nonwoven fabric comprising fused fibers, non-fused fibers and absorptive material and method of making same
Samejima Tadanori
- 24 May 1978
TL;DR: In this article, a novel nonwoven fabric having good strength as well as good permeability and softness and a method of making the same is disclosed. This product consists essentially of supporting fibers containing a heat-fusible fiber and an adsorptive material, and a web is formed from the final mixture followed by being subjected to a heat treatment at a temperature above the melting point of the heatfused fiber.
136
Patent
Room air treatment system
Paul J. Kudirka,Gregory T. Grochoski,Robert W. Hamilton +2 more
- 03 Jul 1986
TL;DR: In this article, a room air treatment system is described, where air is drawn through a large particle prefilter, a first carbon filter, a second dual honeycomb matrix carbon filter in which the honeycomb cells in adjacent matrices are offset relative to one another, a blower mounted on vibration isolation mounts and is expelled by the blower into a plenum from when it exits upwardly through a fine particle HEPA filter and finally out through a combination fine particle filter and carbon filter.
136
Patent
Sealable transportable container having a particle filtering system
Mihir Parikh,Anthony C. Bonora +1 more
- 01 May 1986
TL;DR: In this paper, a sealed transportable container for use with processing equipment having a port plate and port door sealably mating to the port plate, the transportable containers including a box having an interior space for containing the articles and a conduit for communicating between the interior space and the environment external the box.
133
Airborne chemical contamination of a chemically amplified resist
Scott A. MacDonald,Nicholas J. Clecak,H. R. Wendt,C. Grant Willson,Clinton David Snyder,C. J. Knors,N. B. Deyoe,John G. Maltabes,James R. Morrow,Anne E. McGuire,Steven J. Holmes +10 more
- 01 Jun 1991
TL;DR: In this article, the performance of the t-BOC/onium salt resist system is severely degraded by vapor from organic bases, which can be observed when the coated wafers stand for 15 minutes in air containing as little as 15 parts per billion (ppb) of an organic base.
129