Patent
Automatic focusing apparatus and method
Chien-Sheng Liu,Pin-Hao Hu +1 more
- 25 Apr 2011
20
TL;DR: In this paper, an automatic focusing apparatus and a method thereof are provided, which includes a light source, an optical imaging unit, a photo-sensor and a focusing regulation unit.
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Abstract: An automatic focusing apparatus and a method thereof are provided. The apparatus includes a light source, an optical imaging unit, a photo-sensor and a focusing regulation unit. The optical imaging unit includes an object lens and a beam splitter. The beam splitter divides a reflecting beam into a first sub-beam and a second sub-beam. The optical imaging unit has a first imaging optical path and a second imaging optical path with different imaging precisions corresponding to the first sub-beam and the second sub-beam, respectively. The photo-sensor detects a defocus position of the object. The focusing regulation unit adjusts the distance between the object and the object lens and selects an imaging precision, so that the defocus position of the object is placed within the imaging precision of the first optical path and the imaging precision of the second optical path in sequence.
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Citations
Patent
Focal position adjustment method and inspection method
Hiroyuki Nagahama,Ogawa Riki +1 more
- 10 Dec 2014
TL;DR: In this paper, a focal position adjusting method for an inspection apparatus includes an illumination optical system and an imaging optical system configured to perform a defect inspection of a pattern formed in a sample using an image imaged on a first sensor.
5
Patent
Optical measuring device with positional displacement detection
Takashi Fujimoto
- 29 May 2013
TL;DR: In this paper, an optical measuring device capable of easily improving accuracy in measurement of a measurement object is presented. But the measurement object's position is not determined by the optical signals from the first and the second image sensors.
3
Patent
Continuous automatic focus system and method
Ji Xinming,Dou Hongyan +1 more
- 29 Apr 2015
TL;DR: In this paper, a continuous automatic focus (CAF) system consisting of a light collection element, a measurement photoelectric detection unit, a direct current integrating circuit, a micro control unit (MCU) and a stepping motor is described.
1
Patent
Debugging device of optical system and debugging method thereof
Zhang Jing,Qiu Wei,Qiu Rongsheng +2 more
- 28 May 2019
TL;DR: In this paper, a debugging device of an optical system and a debugging method thereof is described, which comprises an optical platform and an optical systems and detector array arranged on the optical platform; a collimator and a target object and light source arranged above the collimators.
1
Patent
Optical Measuring Device
Takashi Fujimoto
- 29 May 2013
TL;DR: In this article, an optical measuring device capable of easily improving accuracy in measurement of a measurement object is presented. But the measurement object's position is not determined by the optical signals from the first and the second image sensors.
1
References
Development of the fast astigmatic auto-focus microscope system
Wei-Yao Hsu,Chien-Shing Lee,Po-Jui Chen,Nien-Tsu Chen,Fong-Zhi Chen,Zong-Ru Yu,Ching-Hsiang Kuo,Chi-Hung Hwang +7 more
TL;DR: In this article, a collimated infrared laser beam was employed in the infinite-corrected microscope optical axis by the beam splitter and reflected by the sample surface, and the reflected laser beam has different focal lengths in the sagittal and tangential planes.
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A microscope system based on bevel-axial method auto-focus
TL;DR: A bevel-axial method that had an included angle between CCD sensor and image plane with multi-parameters fusing from image to obtain the in-focus position directly in the first phase and combined Kalman estimate to obtain that position for different objects in the second phase is proposed.
30
Patent
Method and apparatus for auto-focussing infinity corrected microscopes
Adam Weiss,Alexandre Obotnine,Andrew Lasinski +2 more
- 11 Jun 2007
TL;DR: In this paper, a method and apparatus for auto-focussing an infinity corrected microscope is presented. Light beams are directed and then converged towards a specimen of interest and at least one image is formed from the reflected light.
28
Patent
Field stop for dark field illumination in autofocus optical device
Burkhard Neumann,Hans-Werner Stankewitz +1 more
- 17 Apr 1987
TL;DR: In this article, an optical component is described which can be introduced into a finite or an infinite beam path and which is provided with a spectrally selective filtering characteristic and thus as the same time compensates the thereby generated geometric-optical negative influence by appropriate image-relevant compensation measures.
26
Patent
Confocal displacement sensor
Anton Schick,アントン シック +1 more
- 12 Sep 2003
TL;DR: In this article, a confocal displacement sensor is created in which, through a graduated arrangement of optical outputs relative to an imaging optic in the object area of displacement sensor, real images of the optical outputs can be created at different heights.
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