Journal Article10.1109/TUFFC.2019.2928147
An Analytical Equivalent Circuit Model for Optimization Design of a Broadband Piezoelectric Micromachined Ultrasonic Transducer With an Annular Diaphragm
Tingzhong Xu,Libo Zhao,Zhuangde Jiang,Guo Shuaishuai,Zhikang Li,Guoxi Luo,Lin Sun,Liangchi Zhang +7 more
33
TL;DR: The model successfully explains the phenomenon of multi-resonance peaks in the frequency response curve, sharing the same vibration mode and can be further generalized to be a guideline for the design and optimization of broadband PMUTs.
read more
Abstract: This paper presents an equivalent circuit model, a systematic design, and optimization method for developing a broadband annular diaphragm piezoelectric micromachined ultrasonic transducer (A-PMUT). By utilizing array analysis methods, an annular diaphragm is regarded as an array consisting of equally spaced sector diaphragms influencing each other by crosstalk effect. The model successfully explains the phenomenon of multi-resonance peaks in the frequency response curve, sharing the same vibration mode. The study finds that the analytical predictions of the model are in good agreement with the simulation and experimental results. Meanwhile, based on the phenomenon of multi-resonance peaks, a systematic design method is proposed to extend the bandwidth of the A-PMUT. In this method, the radiation impedance of the A-PMUT is separated into crosstalk-free and crosstalk contributed parts. This method enables the determination of the optimal structure counting for the influences on the frequency response of A-PMUTs for broadband applications. The model here can also be further generalized to be a guideline for the design and optimization of broadband PMUTs.
read more
Chat with Paper
AI Agents for this Paper
Find similar papers on Google Scholar, PubMed and Arxiv
Write a critical review of this paper
Analyze citations of this paper to find unaddressed research gaps
Citations
Detection Principles of Temperature Compensated Oscillators with Reactance Influence on Piezoelectric Resonator.
Vojko Matko,Miro Milanovič +1 more
TL;DR: This review presents various ways of detection of different physical quantities based on the frequency change of oscillators using piezoelectric crystals and explains the temperature–frequency compensation of the crystals’ characteristics in oscillators that use temperature-frequency pair of crystals.
Equivalent Circuit Models of Cell and Array for Resonant Cavity-Based Piezoelectric Micromachined Ultrasonic Transducer
Tingzhong Xu,Libo Zhao,Zhuangde Jiang,Guo Shuaishuai,Zhikang Li,Ping Yang,Guoxi Luo,Lin Sun,Liangchi Zhang +8 more
TL;DR: An optimized design is established to achieve high output pressure and a good array working performance and the cavity-based design and its model can be used for further advanced PMUT cell structures in other arrays to improve their performance.
24
Equivalent Circuit Model for a Large Array of Coupled Piezoelectric Micromachined Ultrasonic Transducers With High Emission Performance
Tingzhong Xu,Libo Zhao,Zhuangde Jiang,Guo Shuaishuai,Zhikang Li,Ping Yang,Guoxi Luo,Lin Sun,Liangchi Zhang +8 more
TL;DR: An analytical equivalent circuit model is established for the piezoelectric micromachined ultrasonic transducer (PMUT) cell and array with a combination of the annular and circular diaphragm-coupled PMUT with a new excitation method and the results indicate that the AC-PMUT array has a much lower crosstalk effect than that of the traditional C- PMUT array.
23
Structural design of an acoustic planar array transducer by using the equivalent circuit method.
Seonghun Pyo,Yongrae Roh +1 more
TL;DR: The equivalent circuit method (ECM) developed in this work can facilitate the design of an underwater planar array transducer with a superior speed and efficiency compared with those achievable with the conventional numerical analysis methods such as the FEM.
20
Analysis of the transmitting characteristics of an acoustic conformal array of multimode tonpilz transducers by the equivalent circuit method
TL;DR: In this paper, the effect of mutual interference between constitutive elements of the conformal array in addition to its own property of the array was analyzed using an equivalent circuit method, which has not been possible with conventional equivalent circuits.
12
References
Treatise on the Theory of Bessel Functions
G. N. Watson
- 01 Jan 1944
TL;DR: The tabulation of Bessel functions can be found in this article, where the authors present a comprehensive survey of the Bessel coefficients before and after 1826, as well as their extensions.
5.1K
•Book
Formulas for natural frequency and mode shape
Robert D. Blevins,R. Plunkett +1 more
- 01 Jan 1979
2.1K
•Book
Theory and Analysis of Elastic Plates and Shells
J. N. Reddy
- 01 Jan 2016
TL;DR: The Theory and Analysis of Elastic Plates and Shells, Second Edition as mentioned in this paper presents a complete survey of the behavior of these structural elements in aerospace, automotive, and civil engineering structures.
1.8K
Ultrasonic arrays for non-destructive evaluation: A review
TL;DR: The use of ultrasonic arrays for non-destructive evaluation has been extensively studied in the literature as mentioned in this paper, where the main advantages of arrays are their increased flexibility over traditional single element transducers, and their ability to produce immediate images of the test structure.
1K