Patent
Alignment precision detection method and system
Wang Yansheng,Li Xianjie +1 more
- 22 Jan 2014
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TL;DR: In this paper, the authors proposed an alignment precision detection method which comprises the following steps: step 1, aligning by using a same set of alignment marks on a test plate; step 2, carrying out primary alignment exposure by using the alignment marks for exposure of a first group of scales and then carrying out secondary alignment exposure again for exposure, and step 3, subjecting the test plate to development and observing graduation lines totally aligned with the two groups of scales so as to obtain offset directions and offset amounts in an X direction and a Y direction.
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Abstract: The invention provides an alignment precision detection method. The method comprises the following steps: step 1, carrying out aligning by using a same set of alignment marks on a test plate; step 2, carrying out primary alignment exposure by using the alignment marks for exposure of a first group of scales and then carrying out secondary alignment exposure by using the alignment marks again for exposure of a second group of scales; and step 3, subjecting the test plate to development and observing graduation lines totally aligned with the two groups of scales so as to obtain offset directions and offset amounts in an X direction and a Y direction. The invention has the following beneficial effects: the method can detect repeated alignment precision and interlaminar alignment precision of high-alignment precision laser direct imaging equipment; an alignment precision detection system has the characteristic of transfer of influence of the system itself and has a minimum precision error of 1 mu m; measurement is not needed, detection precision can be accurately acquired through direct observation, and influence of precision of measurement equipment and measurement errors are avoided.
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Citations
Patent
Substrate, mask plate, display device and alignment method
Zhang Pengfei,Luo Yiyong +1 more
- 29 Jul 2015
TL;DR: In this article, a substrate, a mask plate, a display device, and an alignment method are disclosed to reduce the probability of alignment errors occurring during the working process of a picture composition device, so that the activation of the device is improved.
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Layer offset detection method for printed circuit board
Hu Lunhong,Bai Jianguo,Tang Youjun,Guan Zhifeng +3 more
- 12 Oct 2016
TL;DR: In this paper, a layer offset detection method for a multi-layer printed circuit board is presented, which consists of steps of obtaining a multilayer printed circuit boards to be detected.
1
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Detection method of alignment performance of photoetching machine
Gan Zhifeng,Zhi Hui,Mao Zhibiao +2 more
- 20 Aug 2014
TL;DR: In this article, a detection method of an alignment performance of a photo-etching machine is presented, which comprises the steps: providing a to-be-exposed wafer, making a mask plate, wherein the mask plate is provided with a rectangle and an iterated mark pattern; through photoetching, transferring the rectangle and the iterated marking pattern of mask plate to the wafer; and measuring an off-centering amount of iterated marks between a complete exposure unit and an incomplete exposure unit through a method of translating an exposure layout.
1
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Embedded circuit board and preparation method thereof
Xuan Guanghua,Li Jinhong +1 more
- 27 Jul 2016
TL;DR: In this paper, an embedded circuit board consisting of a mother board and a daughter board is described, where the mother board is provided with an accommodating groove and the daughter board with a calibrated scale.
1
Patent
Display panel and method for monitoring precision of printed circuit of display panel
Liu Linfeng
- 25 Oct 2019
TL;DR: In this paper, a display panel and a method for monitoring the precision of a printed circuit of a display was presented. And the display panel also included an alignment scaleplate arranged at the edge region of the printed circuit, which included a plurality of parallel alignment scales.
References
Patent
Reticle having mark for detecting alignment and method for detected alignment
Kazuki Yokota
- 28 Oct 1999
TL;DR: In this article, the alignment marks (X1, X2, Y1 and Y2) having the divided minute segments can more accurately detect the misalignment between two layers of a semiconductor wafer compared with a conventional aligning method employing box marks having a much larger size.
11
Patent
Detection method of registration precision of interlayer graph
Yan Xiaonian,Wei Zhaoling,Yang Yuming +2 more
- 16 Jan 2013
TL;DR: In this article, a detection method of registration precision of an interlayer graph is proposed, which aims at solving a series of problems, such as time and labor consumption, poor precision, low reliability and the like, because a circuit board is required to be cut into small pieces and grinded to be smooth and then detected when the interlayer registration precision is detected.
5
Patent
Measurement structure for measuring registering precision
Zhu Jun
- 09 Feb 2011
TL;DR: In this paper, the authors proposed a measurement structure for measuring registering precision, which comprises two parts, namely a previous layer aligned structure and a current layer alignment structure, wherein the measurement structure is a central axisymmetric pattern.
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