Journal Article10.1109/TSMCA.2009.2019877
A Performance Tradeoff Function for Evaluating Suggested Parameters in the Reactive Ion Etching Process
Henry C. W. Lau,C.X.H. Tang,Bartholomew P.K. Leung,Carman K. M. Lee,G.T.S. Ho +4 more
- 01 Jul 2009
- Vol. 39, Iss: 4, pp 933-938
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TL;DR: A novel performance tradeoff function is presented for evaluating the overall suitability of adopting the predicted control parameters suggested by domain experts, taking into full consideration their impact on the performance of the machine involved.
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Abstract: Reactive ion etching (RIE) is a process in the fabrication of semiconductor devices. The ability to predict the influence of the process parameters of RIE is crucial in terms of machine performance as they may have a serious impact on product quality as well as on the probability of machine failure. To address this issue, this correspondence paper presents a novel performance tradeoff function for evaluating the overall suitability of adopting the predicted control parameters suggested by domain experts, taking into full consideration their impact on the performance of the machine involved. An experiment using the RIE machine is provided to validate the practicability of the proposed approach.
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Citations
Statistical Quality Control
TL;DR: In the early days of the Second World War, statistical quality control methods of the statistical type were to be found in comparatively few industries as discussed by the authors ; however, the War itself saw them introduced, frequently under Government auspices, into a wide range of industries which had previously never used them.
Aluminium Surface Grain Size Analysis on RIE Treatment
Zaliman Sauli,Vithyacharan Retnasamy,Fairul Afzal Ahmad Fuad,Phaklen Ehkan,Moganraj Palianysamy,Aaron Koay Terr Yeow +5 more
TL;DR: In this paper, the effect of reactive ion etch (RIE) on the grain size of aluminum film was investigated and the results showed that RIE affects the mean grain size as it increases after RIE treatment.
3
A hybrid decision model for improving warehouse efficiency in a process-oriented view
C. X. H. Tang,Henry C. W. Lau +1 more
- 01 Jan 2010
TL;DR: This chapter aims to develop a Fuzzy-GA capacity decision model (FGCDM) to enhance rack efficiency in a One-Warehouse, N-Supplier warehouse by taking into consideration the performance metrics and various driving factors of the related processes.
Surface Roughness Influence on O2 and Ar RIE Gas Treated Aluminum Surface
Zaliman Sauli,Vithyacharan Retnasamy,Uda Hashim,Steven Taniselass,Moganraj Palianysamy,Ramzan Mat Ayub +5 more
TL;DR: In this article, preliminary investigations on the effect of Reactive Ion Etch (RIE) parameters on the surface characteristics of Al bond pad were done employing Design of Experiment (DOE) method.
1
References
•Book
Introduction to Quality Engineering: Designing Quality into Products and Processes
Genichi Taguchi
- 01 Oct 1986
TL;DR: In this paper, a case study of variance loss and tolerance design for online and offline quality control is presented, where the S/N ratio is bypassed by a spring experiment.
1K
•Book
Design and Analysis of Experiments for Statistical Selection, Screening, and Multiple Comparisons
Ajit C. Tamhane
- 01 Jul 1995
TL;DR: The Rationale of Selection, Screening and Multiple Comparisons for Normal Response Experiments is discussed in this article, where the Indifference Zone approach is used to select the best treatment in a single-factor Normal Response Experiment.
493
Optimization Models for Training Belief-Rule-Based Systems
Jian-Bo Yang,Jun Liu,Dong-Ling Xu,Jin Wang,Hongwei Wang +4 more
- 01 Jul 2007
TL;DR: A belief rule-base inference methodology using the evidential reasoning approach (RIMER) has been developed recently, where a new belief rule representation scheme is proposed to extend traditional IF-THEN rules.
•Book
Microsystem Technology and Microrobotics
Sergej Fatikow,Ulrich Rembold +1 more
- 20 Mar 1997
TL;DR: This is a basic introduction to MST, the first of its kind to cover MST in its entirety, including a survey of recently built products and recent developments.
161