Journal Article10.1088/0034-4885/47/3/001
A comparative study of methods for thin-film and surface analysis
H W Werner,R P H Garten +1 more
TL;DR: In this article, a number of features characteristic of different thin-film analytical methods are reviewed and evaluated, and the principles, approach for quantification and prominent problems of the most commonly used methods (ESCA, AES, SIMS, LEIS, RBS and NRA) are discussed.
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Abstract: A number of features characteristic of different thin-film analytical methods are reviewed and evaluated. The principles, approach for quantification and prominent problems of the most commonly used methods (ESCA, AES, SIMS, LEIS, RBS and NRA) are discussed. Evaluation of the special advantages and disadvantages of the different methods points out the need for a synergetic multi-method approach in thin-film analysis.
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Citations
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216
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Practical surface analysis: state of the art and recent developments in AES, XPS, ISS and SIMS
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104
Evaluation of the kinetics and mechanisms of hybriding reactions
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References
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XPS studies of surface damages of transition metal fluorosilicates under argon ion bombardment
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