Journal Article10.1088/0960-1317/24/2/025002
A batch-mode micromachining process for spherical structures
TL;DR: In this article, a self-aligned three-dimensional process (3D-SOULE) that incorporates batchmode micro ultrasonic machining, lapping and micro electro-discharge machining (µEDM) for fabrication of concave and mushroom-shaped spherical structures from hard and brittle materials is presented.
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Abstract: This paper reports a self-aligned three-dimensional process (3D-SOULE) that incorporates batch-mode micro ultrasonic machining (µUSM), lapping and micro electro-discharge machining (µEDM) for fabrication of concave and mushroom-shaped spherical structures from hard and brittle materials. To demonstrate the process, 1 mm structures are fabricated from glass and ruby spheres. The µEDM technique is used to create the tool for μUSM from stainless steel spheres. Stainless steel 440, which provides a tool wear ratio <5%, is chosen as the tool material. A 2 × 2 array is used for batch processing. For an ultrasound generator frequency of 20 kHz and a vibration amplitude of 15 µm, machining rates of 24 and 12 µm min−1 are obtained for glass and ruby spheres, respectively. An approximate linear relationship is observed between the measured roughness (Ra) of the machined surface and the product of the fracture toughness (KIC) and the hardness (H) of the workpiece material (KIC3/2H1/2).
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Micro-electrical discharge machining of 3D micro-molds from Pd40Cu30P20Ni10 metallic glass by using laminated 3D micro-electrodes
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