Abstract: A precision 6-degree-of-freedom measurement system has been developed for simultaneous on-line measurements of six motion errors of an X-Y stage. The system employs four laser Doppler scales and two quadrant photo detectors to detect the positions and the rotations of an optical reflection device mounted on the top of the X-Y stage. Compared to the HP5528A system, the linear positioning accuracy of the developed measurement system is better than 60.1 mm to the range of 200 mm and the vertical straightness error is within 61.5 mm for the measuring range of 60.1 mm. The yaw and pitch errors are about 61 arcsec, and the roll error is about 63 arcsec within the range of 650 arcsec. © 2000 Elsevier Science Inc. All rights reserved.

Abstract: This paper presents a method for the measurement of nonlinearity in heterodyne interferometry which utilizes the frequency spectrum of the output of the photodetector for the direct measurement of the magnitudes of the first and second harmonic nonlinearities. The underlying theory and the experimental technique are discussed. Results showing the application of this technique for the determination of the influence of the azimuthal alignments of the polarization beamsplitter, the analyzer and measurement retroreflector are presented. The applicability of the technique to the in situ optimization of an interferometer system is demonstrated. It is shown that using this technique an interferometer system can be optimized to reduce the first-harmonic nonlinearity to below 0.5 nm p-p and the second harmonic nonlinearity to 2 nm p-p. This method is contrasted with other methods and the advantages conferred by the elimination of an external reference and the phase measuring electronics are highlighted.

Abstract: An internal magnetic abrasive finishing process using a pole rotation system was proposed to produce highly finished inner surfaces of workpieces used in critical applications. Previous research found that the process incorporating one of the characteristic behaviors of the abrasive, the jumbling of the abrasive, results in aggressive contact of the abrasive against the inner surface, disturbing the smooth surface finish. The aim of this paper, therefore, is to characterize the in-process abrasive behavior against the surface and its effects on the finishing characteristics and to describe the finishing mechanism. The magnetic force acting on the magnetic abrasive, controlled by the field at the finishing area, is considered the primary influence on the abrasive behavior against the inner surface of the workpiece. This study examines the relationships between the magnetic field, the force on the abrasive, and the abrasive behavior. The surface roughness and material removal measurements resulting from finishing experiments demonstrate the effects of the abrasive behavior on the surface modifications. This paper also proposes a method to monitor the in-process abrasive behavior to facilitate processing.

Abstract: A neural network based on Artificial Resonance Theory (ART-map) was used to predict and compensate the tool point errors of a 3-axis machining center using discrete temperature readings from the machine’s structure as inputs. A combination of kinematic error modeling, curve fitting, and the neural network were used to maintain the machine’s three-dimensional (3-D) accuracy within ±7.4 μm, regardless of the thermal state. The network model was evaluated with diagonal measurements and part machining tests. A laser ball bar was used to take the necessary measurements for training the neural network.

Abstract: A heuristic approach is proposed in this paper to model form errors for cylindricity evaluation using genetic algorithms (GAs). The proposed GAs method shows good flexibility and excellent performance in evaluating the engineering surfaces via measurement data involved with randomness and uncertainty. The numerical-oriented genetic operator is used as a basic representation for error modeling in the paper. The theoretical basis for the proposed Gas-based cylindricity evaluation algorithms is first presented. The performance of the method under various combinations of parameters and the precision improvement on the evaluation of cylindricity are carefully analyzed. One numerical example is presented to illustrate the effectiveness of the proposed method and to compare the Gas-based modeling results with those obtained by the least-squares method. Numerical results indicate that the proposed GAs method does provide better accuracy on cylindricity evaluation. The method can also be extended for solving difficult form error minimization and profile evaluation problems of various geometric parts in engineering metrology.

Abstract: This paper presents techniques for fabricating microscopic, curvilinear features in a variety of workpiece materials. Micro-grooving and micro-threading tools having cutting widths as small as 13 {micro}m are made by focused ion beam sputtering and used for ultra-precision machining. Tool fabrication involves directing a 20 keV gallium beam at polished cylindrical punches made of cobalt M42 high-speed steel or C2 tungsten carbide to create a number of critically aligned facets. Sputtering produces rake facets of desired angle and cutting edges having radii of curvature equal to 0.4 {micro}m. Clearance for minimizing frictional drag of a tool results from a particular ion beam/target geometry that accounts for the sputter yield dependence on incidence angle. It is believed that geometrically specific cutting tools of this dimension have not been made previously. Numerically controlled, ultra-precision machining with micro-grooving tools results in a close match between tool width and feature size. Microtools are used to machine 13 {micro}m wide, 4 {micro}m deep, helical grooves in polymethyl methacrylate and 6061 Al cylindrical workplaces. Micro-grooving tools are also used to fabricate sinusoidal cross-section features in planar metal samples.

Abstract: This paper discusses a technique for reducing subsurface damage and/or increasing material removal rate (MRR) in ceramics grinding. An indentation damage model shows that intermittent unloading can produce a lateral crack before the median crack fully develops. It shows that upon reloading, the lateral crack shields against further median crack penetration. Furthermore, intermittent unloading produces shielding even for oblique indentation events and intermediate locations of lateral cracks. Single-grit scratch tests provide experimental validation of the beneficial effects of intermittent unloading. A magnetostrictive actuator modulated the workpiece to create the intermittent unloading. Simulation studies predict that force per grit can be doubled under modulated conditions without an increase in normal damage in the finished workpiece. Our experimental observations show a 62% increase in MRR with minimal associated increase in depth of penetration of the median crack. Alternatively, the experimental results also show that modulations could be used to reduce the depth of median crack penetration by 24% at the same MRR. In addition, we observed that damage depth increases with an increase in the ratio of cutting speed to modulation frequency. Finally, both depth of cut modulation and cutting direction modulation were effective in reducing subsurface damage.

Abstract: Ball-screw-driven slide systems are largely used in industry for motion control applications. Their performance using standard proportional-integral-derivative (PID) control algorithm is unsatisfactory in submicrometer motion control because of nonlinear friction effects. In this article, controllers based on a bristle-type nonlinear contact model are developed and implemented for submicrometer motion. For submicrometer positioning, a proportional-derivative (PD) control scheme with a nonlinear friction estimate algorithm is developed, and its performance is compared with that of a PID controller. For tracking, a disturbance observer was added to reject external disturbances and to improve robustness. The experimental results indicate that the proposed controller has consistent performance in positioning with under 1.5% of steady-state error in the submicrometer range. For tracking performance, the proposed controller shows good and robust tracking with respect to parameter variation.

Abstract: This paper presents a nanomachining instrument that was developed for conducting nanocutting, nanoscratching, and nanoindentation experiments. A piezoelectric tube scanner (PZT) is employed to generate three-dimensional machining motions. The sample is moved by the PZT, and the tool is kept stationary during machining. The machining forces are measured by force sensors with a resolution of sub-milliNewtons. The instrument is compact and can be used inside optical microscopes and scanning electron microscopes. In this paper, depth-sensing indentation experiments were performed to test the basic performance of the instrument. The indentation displacement was measured by a capacitance probe situated inside the PZT tube. An experimental system was constructed to locate and image indentations. The system consists of a high magnification microscope to measure coordinates of the indentation relative to a reference corner point on the sample, and an AFM equipped with an on-axis optical imaging system for locating the indentation. A technique was also employed to establish the tool-sample contact to nanometer accuracy. Indentation experiments were carried out on three kinds of materials with different hardness. Experimental results demonstrated the instrument has the ability of performing depth-sensing indentations. The frame compliance was also evaluated from the indentation results.

Abstract: A new 3-DOF Z-tilts (z, pitch, and roll motion) micropositioning system has been developed. It uses electromagnetic actuators and air bearings. An electromagnetic actuator produces an attraction force between the air bearing and the base plate. An air bearing has the role of suspension and guidance, with a clearance of several tens of micrometers in the z-direction. Therefore, this system has design features of guiding 3-DOF XYθ motion without limiting the plane motion and playing the role of a z-directional position actuator. With the control of current, the equilibrium position between magnetic attraction force and air bearing thrust force can be controlled with inherently infinite resolutions. The theoretical background of an electromagnetic actuator is explained. Then, an air bearing is analyzed in the point of z-directional positioning mechanism. The air bearing can be modeled as a second-order system with parameter variation—stiffness and damping vary with respect to the z-directional displacement. Therefore, a simple robust control algorithm is applied to improve the control performance. With the aid of robust control, this system provides 25 nm positioning resolution over the total range of 40 μm along the z-direction and, accordingly, 0.29 μrad resolution over the total range of 460 μrad in pitch and roll motion.

Abstract: In recent years, various micro machining processes have been developed to meet the demand for micro machines. However, the material is limited to silicon or plastics. In this study, the authors developed a method to form micro models by a metal jet. This method is similar to an ink jet printing system. A thin layer is first formed by molten metal drops ejected through a nozzle, and a second layer is formed on the first layer. The repetition of this process produces 3-dimensional models. The diameters of hemispherical metal dots adhered on a base plate were about 400 μm. To perform forming, a computer-controlled X-Y-Z stage was used to move the base plate based on 3-dimensional CAD data. Suitable conditions for the metal jet head such as actuating voltage, temperature of molten metal, ejecting frequency and so on were studied to perform accurate and stable forming, and some typical examples of 3-dimensional electric circuits and functionally gradient material were shown.

Abstract: Many methods to evaluate the form error of a sphere have been studied over the years. Most of these, such as the optimum methods, employed the approximate local solution to obtain the desired results. In this paper, three mathematical models are constructed to evaluate the solutions of the minimum circumscribed sphere, the maximum inscribed sphere, and the minimum zone sphere by directly resolving the simultaneous linear algebraic equations. Examples are given to verify that the model is admissible and reliable. These simple mathematical methods are verified to be useful for determining the exact solution.

Abstract: A fast recursive algorithm for determining the Gaussian filtered mean line was deduced using the central limit theorem and an approximation method. This recursive algorithm uses a small number of multiplications per loop and otherwise such simple computer operations as addition and subtraction, and therefore, can achieve a very high computational speed. Special cases are also presented in which the relatively inefficient multiplication operation in the computer can be replaced by the efficient digit shifting operation, and the filtering computational efficiency is enhanced further. High-order algorithms are proposed for practical use to improve filtering accuracy. The “forward filtering” and “backward filtering” implementation of the recursive algorithm results in zero phase distortion of the filtered mean line. A new relationship between the Gaussian filtering method and the classical 2RC filtering method is also established using this algorithm.

Abstract: In this paper, the master axis method of machine tool spindle measurement is described. This method allows spindle measurements to be carried out at speed and under load. For example, a radial load representing the cutting force in a turning operation can be conveniently applied during characterization of a lathe spindle. The synchronous and asynchronous error motions have been observed to vary in both magnitude and shape with changes in load. Test results from both static and dynamic loads during testing are shown to demonstrate the utility of the method.

Abstract: In tool grinding operations, especially ceramic cutting tool materials, two aims are important: high production efficiency and high-precision cutting edges with minimum surface and subsurface damage. Using conventional grinding conditions, these two aims cannot be combined without essential restrictions. In-process dressing enables efficient use of fine-grained grinding wheels to obtain superior cutting edge quality.

Abstract: An instrument capable of measuring arbitrary, dynamic CNC tool paths through three-dimensional space with micrometer-level accuracy is developed and tested. The instrument uses three Laser Ball Bars simultaneously (i.e., simultaneous trilateration) to allow for dynamic path measurements. The design of the instrument is described. The performance is verified by static repeatability testing, comparison with an independent measurement system, and comparison with the dimensions of machined parts. The instrument is demonstrated to be capable of measurement of arbitrary three dimensional tool paths with near micron level accuracy.

Abstract: A new type of master gear, the Gauge Block Gear (GBG), was developed for the performance verification of coordinate measuring machines (CMMs), for the specific task of pitch and chordal tooth thickness measurement. Its main characteristic is the replacement of the teeth with gauge blocks to achieve direct traceability of the chordal tooth thickness. Mathematical models for the geometrical definition of cylindrical gears with involute toothing, data evaluation, and assessment of the task-related uncertainty, were formulated, and measuring strategies for CMMs were designed and implemented. The GBG was calibrated using the swing round method, and measurement uncertainties on chordal tooth thickness and total pitch deviation Fp were determined to be 0.9 μm and 1.4 μm, respectively. Assembly stability and flexibility of the artefact were verified with measurements performed on a CMM provided with general purpose software, one with dedicated gear measuring software, a form tester, and a conventional gear measuring center. Results confirm the correctness of the mathematical models developed to analyze CMM results as well as their compatibility with existing approaches. The Gauge Block Gear provides, therefore, for direct traceability of the chordal tooth thickness and allows the definition of the task-specific uncertainty of pitch and tooth thickness measurements of cylindrical gears as basis for the assessment of the metrological capability of measuring machines.

Abstract: Cylindrical surfaces are increasingly utilized in various areas, and related high-efficiency and high-quality fabricating technologies are of great importance and significant benefit to modern industry. To provide fundamental knowledge for the bearing industry, studies have been conducted on the use of cast-iron-bonded cubic boron nitride (cBN) superabrasive wheels, based on electrolytic in-process dressing (ELID) technique for realizing high-efficiency grinding of steel cylindrical workpieces. Therefore, in this investigation, experiments were carried out on an ordinary cylindrical grinder with a hydrodynamic spindle, and straight type grinding wheels of different grit sizes were used. The effects of grit sizes on surface roughness as well as waviness, roundness, and surface stress were evaluated in both the traverse and plunge grinding modes. Comparison of ELID grinding with other processes was also carried out. Mirror surface grinding of different materials was achieved with the #4000 CIB-cBN wheel. ELID grinding was confirmed to induce compressive stress and to be more cost effective for small batch production of larger components when it works in the traverse mode.

Abstract: The grain depth-of-cut in plunge grinding was analyzed using computer simulation and an analytic model. Two regimes were identified for the depth-of-cut as a function of the infeed. At lower infeeds, there is a unique correlation between grinding grooves and cutting grains, and the depth-of-cut is equal to the infeed. At higher infeeds, the correlation is destroyed, and the depth-of-cut can be much less than the infeed. An analytic model that takes into account only the mean surface position while ignoring the surface profile can describe the latter regime.

Abstract: This paper presents some aspects of design approach, modeling, and experimental measurement results of a fiber optic-based surface topography measurement sensor that can measure surface roughness as well as the distance between the sensor tip and a surface and surface inclination angles. The working principle of the sensor is based on the detection of light intensity reflecting from the surface being measured. The sensor is very small and easy to operate. It can be attached to a coordinate measuring machine (CMM) to measure surface position coordinates, inclination angles, and surface roughness in a noncontact manner at one measurement setup. A theoretical model of intensity distribution and intensity detection has been established for the sensor. A three-factor and three-level experiment was designed to investigate the relationship between sensor performance and sensor design parameters. Two second-order regression models have been generated, which show that the central distance between the emitting and receiving fibers of a sensor has the strongest influence on the effective range of the sensor; whereas, the critical angle of a receiving fiber influences the sensitivity of the sensor most.

Abstract: As processes become more complex, the need for improved methods of process optimization increases. To meet this goal, quality management (QM) with its methods, procedures and tools requires repeatable quantitative metrology results. We often overlook the fact that not only the production process, with its external and internal influences, is subject to variation, but the measurement process is as well. The real process situation is falsified through the “eyes of the measuring instrument,” because the uncertainty of measurement by the measuring instrument overlaps the deviation of the production process. This paper discusses in detail those boundary conditions that must be considered and which characteristics of the measuring instrument are important for obtaining sound characteristic values.

Abstract: Presently, coatings of electroless nickel are used for diamond turning molds for injection molding of optical lenses. We have investigated the diamond machinability of substoichiometric hard nitride coatings (TiN x , TiAlN x, and CrN x ). These coatings have a superior hardness compared to electroless nickel suggesting an improved wear resistance of molds with optical surface quality. In the case of CrN x and TiAlN x , high tool wear occurred, even after small cutting distances, and the surfaces showed a roughness larger than R a = 0.5 μm. A considerably higher surface quality was obtained on TiN x coatings. The best results (R a = 15 nm) were achieved with a nitrogen content of x = 0.03. As a first application, a mold for a diffractive optical element was machined using this newly developed substoichiometric titanium nitride deposit.

Abstract: A multiloop control system has been implemented in a relatively large recirculating air chamber that maintains one-sigma air temperature stability of 3 mK at the outer loop control point. The control system is a modification to a chamber that formerly held air temperature stability of approximately 0.1°C. A continuously running refrigeration system removes the nominal heat load from the air through a cross-flow heat exchanger. The control system maintains temperature stability in the chamber by modulating the power input to a coil heater. Four thermistors in DC bridges are used to generate the feedback signals.

Abstract: This paper presents a method for the selection of algorithms for the form characterization of nominally spherical surfaces. The form characterization is applied to discrete data obtained from a three-dimensional (3-D) high-precision measurement system. In this paper, five sphere-fitting algorithms are outlined and compared. The fitting algorithms under investigation are: linear and nonlinear least-squares sphere fit, minimum zone sphere fit, four-point sphere fit, and sphere fit by error curve analysis. A method for selection of the best-fit algorithm, based on a spectral analysis of the surface irregularity is suggested and applied to the surface measurement of worn electrical switching contacts.

Abstract: To improve flatness error of plate-shaped workpieces in milling under side clamp holding mechanisms, appropriate magnitudes of clamping forces and method of application are studied in this paper. The effect of side-clamping force on workpiece deformation is investigated by experimental and computational analyses for the case where the workpiece is clamped at a position higher than the neutral plane of bending of the plate-shaped workpiece. It is found that the thermal deformation and elastic deformation caused by clamping force are in two opposite directions. Then, an appropriate method is proposed to compensate for the workpiece thermal deformation caused by cutting heat with the opposite elastic deformation caused by the side-clamping force, so as to keep the machined top surface of the workpiece flat as much as possible. The proposed method has been confirmed through computational analyses and experiments. © 2000 Elsevier Science Inc. All rights reserved.

Abstract: Using water-insoluble cutting fluids, which are good in lubricity but easy to mist, always risks firing and environmental problems. On the other hand, the current water-soluble coolants fail to deliver sufficient lubricity to heavy cutting applications. This study has newly proposed and developed a high water-content cutting fluid, based upon a new concept of having high lubricity despite of its water-soluble nature. As compared to the commercialized water-insoluble cutting fluid, the new cutting fluids shows a better capability of preventing oil mist and is fully applicable into cutting of various metallic materials, particularly effective in cutting of S45C and SUS304. The study also reveals a fact that a sulfur-type extreme pressure agent is the key element to enhance the cutting performance at high temperature.

Abstract: Because friction-induced nonlinearities in positioning systems are generally range of motion-dependent, dual-model or dual-stage strategies are often adopted to deal with the inconsistencies encountered when a system moves from submicrometer steps (micro mode) to larger scale strokes (macro mode). Although good performance is usually obtained when each model/stage operates in its designed range of motion, a system frequently performs less satisfactorally when operating near the switching point between models or stages. An air-lubricated capstan drive was used in this study to minimize the discrepancy between macro and micro modes, and a single-mode MRAC was developed to control the capstan drive system for precision positioning. Accuracy better than ±15 nm with no overshooting was achieved in all conditions tested (including 50 nm, 500 nm and 10 μm steps). Disturbance resistance of the system also proved to be satisfactory.

Abstract: Management of the chips generated in diamond turning is often critical, because contact between chips and the workpiece can result in superficial damage to the finished surface Controlling chip motion is not a trivial process as the proper positioning of an oil or air stream requires an understanding of the dynamics of a diamond turned chip and the machining parameters that affect it Work has been performed to investigate the effects of cutting speed, depth of cut, tool geometry, tool wear, and workpiece material properties on chip motion and geometry Utilizing radius of curvature data from cutting experiments, a parameter has been proposed that can be used to predict chip radius of curvature for a wide range of machining conditions This chip curvature parameter, χ , exhibits a power law relationship with chip radius of curvature as a function of tool geometry, depth of cut, cutting speed, and both elastic and plastic properties of the workpiece material