Journal• ISSN: 1074-407X
Microlithography World
About: Microlithography World is an academic journal. The journal publishes majorly in the area(s): Reticle & Node (networking). It has an ISSN identifier of 1074-407X. Over the lifetime, 2 publications have been published receiving 6 citations.
Topics: Reticle, Node (networking), Image quality
Journal Tools
Papers
Journal Article•
TL;DR: The resist image quality produced by step-and-scan exposure tools depends upon the performance of the synchronized wafer and reticle stages as much as on the quality of the optics.
Abstract: The resist image quality produced by step-and-scan exposure tools depends upon the performance of the synchronized wafer and reticle stages as much as on the quality of the optics. Achieving high throughput and sub-quarter micron resolution requires careful stage engineering.
6 citations
Journal Article•
1 citations
Related Journals (5)
Performance Metrics
| Year | Papers |
|---|---|
| 2005 | 1 |
| 1999 | 1 |