Physical vapor deposition under conditions of obliquely incident flux and limited adatom diffusion results in a film with a columnar microstructure. These columns will be oriented toward the vapor source and substrate rotation can be used to sculpt the columns into various morphologies. This is the basis for glancing angle deposition (GLAD), a technique for fabricating porous thin films with engineered structures. The origin of the columnar structure characteristic of GLAD films is discussed in terms of nucleation processes and structure zone models. As deposition continues, the columnar structures are influenced by atomic-scale ballistic shadowing and surface diffusion. Competitive growth is observed where the tallest columns grow at the expense of smaller features. The column shape evolves during growth, and power-law scaling behavior is observed as shown in both experimental results and theoretical simulations. Due to the porous nature of the films and the increased surface area, a variety of chemical applications and sensor device architectures are possible. Because the GLAD process provides precise nanoscale control over the film structure, characteristics such as the mechanical, magnetic, and optical properties of the deposited film may be engineered for various applications. Depositing onto prepatterned substrates forces the columns to adopt a planar ordering, an important requirement for photonic crystal applications.

Glancing angle deposition: Fabrication, properties, and applications of micro- and nanostructured thin films

Columnar microstructure in vapor-deposited thin films

Near-field microwave microscopy is concerned with quantitative measurement of the microwave electrodynamic response of materials on length scales far shorter than the free-space wavelength of the radiation. Here we review the basic concepts of near-field interactions between a source and sample, present an historical introduction to work in the field, and discuss a novel quantitative modeling approach to interpreting near-field microwave images. We discuss the spatial resolution and a number of concrete applications of near-field microwave microscopy to materials property measurements, as well as future prospects for new types of microscopy.

Principles of Near-Field Microwave Microscopy

We have studied the mechanisms influencing growth of thin films onto an oblique rotating substrate by cross-sectional transmission electron microscopy and scanning electron microscopy. We have analyzed the growth of pillars and helices in random and regular arrays, and have examined the influence of introducing a line of missing nuclei on the growth of regular array of pillars and helices.

Observations of the microscopic growth mechanism of pillars and helices formed by glancing-angle thin-film deposition

We describe a scanning near-field microwave microscope which uses a loop probe to measure local magnetic properties of metallic samples on a length scale of 200 μm. We demonstrate imaging at 6 GHz through spatiallyresolved ferromagnetic resonance experiments on a single crystal of the colossal magneto-resistive material La0.8Sr0.2MnO3. We find the experimental results are qualitatively and quantitatively well described by a simple model of the system.

Magnetic permeability imaging of metals with a scanning near-field microwave microscope

Local variations of uniaxial anisotropy in thin films

The method of local ferromagnetic resonance and direct torsional measurements were used to measure the dependence of the magnetic anisotropy in permalloy films on the angle of incidence in a broad range of such angles. It was found that this dependence is not monotonous and that at larger angles of incidence the easy axis of magnetization is rotated. An interpretation of this phenomenon is proposed.

The dependence of the uniaxial magnetic anisotropy in evaporated films on the angle of incidence

The values of the effective magnetization and uniaxial induced anisotropy were measured on permalloy films, vacuum deposited on unheated glass slides, by the method of local ferromagnetic resonance. The double resonance curves of these films indicate the existence of two magnetically different components; to both components there correspond different values of the effective magnetization and uniaxial anisotropy. These quantities have different local and time variations for each component. The results of measurement agree with the recently proposed model of the stratification of thin ferromagnetic films.

On the effective magnetization and uniaxial anisotropy of permalloy films

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Local variations of uniaxial anisotropy in thin films

The dependence of the uniaxial magnetic anisotropy in evaporated films on the angle of incidence

On the effective magnetization and uniaxial anisotropy of permalloy films