Yusuke Matsuda
Stanford University
32 Papers
77 Citations
Yusuke Matsuda is an academic researcher from Stanford University. The author has contributed to research in topics: Boron nitride & Amorphous silicon. The author has an hindex of 9, co-authored 31 publications. Previous affiliations of Yusuke Matsuda include University of California, San Diego & DuPont.
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Papers
Fracture properties of hydrogenated amorphous silicon carbide thin films
TL;DR: In this paper, the cohesive fracture properties of hydrogenated amorphous silicon carbide (a-SiC:H) thin films in moist environments are reported, and a new atomistic fracture model is presented to describe the observed moisture-assisted cracking in terms of the limited Si O Si suboxide bond formation that occurs in the films.
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Tailored amorphous silicon carbide barrier dielectrics by nitrogen and oxygen doping
TL;DR: In this paper, the effects of N or O doping into hydrogenated amorphous silicon carbide (a-SiC:H) films on molecular structure and resulting material properties with particular attention to elastic constant, cohesive fracture energy, and moisture-assisted cracking were investigated.
23
Toughening thin-film structures with ceramic-like amorphous silicon carbide films.
TL;DR: A significant improvement of adhesion in thin-film structures is demonstrated using embedded ceramic-like amorphous silicon carbide films (a-SiC:H films), which have potential to offer a new toughening strategy for reliability of nanoscale device structures.
17
Patent
Cubic boron nitride sintered body and cubic boron nitride sintered body tool
Yusuke Matsuda,Katsumi Okamura,Satoru Kukino +2 more
- 18 Oct 2011
TL;DR: In this paper, the authors show that in a cross section of the cBN sintered body, an isolated binder phase having an area of 0.05-0.5 µm2 has a protrusion of two or more steps.
10