Abstract The terahertz (0.1–10 THz) range represents a fast-evolving research and industrial field. The great interest for this portion of the electromagnetic spectrum, which lies between the photonics and the electronics ranges, stems from the unique and disruptive sectors where this radiation finds applications in, such as spectroscopy, quantum electronics, sensing and wireless communications beyond 5G. Engineering the propagation of terahertz light has always proved to be an intrinsically difficult task and for a long time it has been the bottleneck hindering the full exploitation of the terahertz spectrum. Amongst the different approaches that have been proposed so far for terahertz signal manipulation, the implementation of metamaterials has proved to be the most successful one, owing to the relative ease of realisation, high efficiency and spectral versatility. In this review, we present the latest developments in terahertz modulators based on metamaterials, while highlighting a few selected key applications in sensing, wireless communications and quantum electronics, which have particularly benefitted from these developments.

Recent progress in terahertz metamaterial modulators

An amplifying quantum-cascade (QC) metasurface, the key component of the QC vertical-external-cavity surface-emitting-laser (VECSEL), is studied as a function of injected current density using reflection-mode terahertz time domain spectroscopy. Nearly perfect absorption is measured at zero bias, which is associated with the transition from the weak to strong coupling condition between the metasurface resonance and an intersubband transition within the QC material. An increase in reflectance is observed as the device is biased, both due to reduction in intersubband loss and the presence of intersubband gain. Significant phase modulation associated with the metasurface resonance is observed via electrical control, which may be useful for electrical tuning of QC-VECSEL. These results provide insight into the interaction between the intersubband QC-gain material and the metasurface and modify the design rules for QC-VECSELs for both biased and unbiased regions.

THz time-domain characterization of amplifying quantum-cascade metasurface

Terahertz (THz) external-cavity lasers based on quantum-cascade (QC) metasurfaces are emerging as widely-tunable, single-mode sources with the potential to cover the 1--6 THz range in discrete bands with milliwatt-level output power. By operating on an ultra-short cavity with a length on the order of the wavelength, the QC vertical-external-cavity surface-emitting-laser (VECSEL) architecture enables continuous, broadband tuning while producing high quality beam patterns and scalable power output. The methods and challenges for designing the metasurface at different frequencies are discussed. As the QC-VECSEL is scaled below 2 THz, the primary challenges are reduced gain from the QC active region, increased metasurface quality factor and its effect on tunable bandwidth, and larger power consumption due to a correspondingly scaled metasurface area. At frequencies above 4.5 THz, challenges arise from a reduced metasurface quality factor and the excess absorption that occurs from proximity to the Reststrahlen band. The results of four different devices — with center frequencies 1.8 THz, 2.8 THz, 3.5 THz, and 4.5 THz — are reported. Each device demonstrated at least 200 GHz of continuous single-mode tuning, with the largest being 650 GHz around 3.5 THz. The limitations of the tuning range are well modeled by a Fabry-Pérot cavity which accounts for the reflection phase of the metasurface and the effect of the metasurface quality factor on laser threshold. Lastly, the effect of different output couplers on device performance is studied, demonstrating a significant trade-off between the slope efficiency and tuning bandwidth.

Wavelength Scaling of Widely-Tunable Terahertz Quantum-Cascade Metasurface Lasers

The THz band, ranging from 0.1 - 10 THz, has largely remained untapped due to challenges in the THz generation. This band occupies a unique position in the electromagnetic spectrum between RF and optical frequencies and can enable several applications such as high-speed communication, imaging, radar, and spectroscopy. However, THz frequencies lie beyond the fmax of silicon technologies, making direct THz generation unfeasible. This paper is an overview of approaches for efficient high-power THz generation in silicon by utilizing the reverse recovery of PIN diodes. We review the design of a THz pulse radiator and a Continuous wave (CW) radiator fabricated using GlobalFoundries 90 nm SiGe BiCMOS process. THz applications such as imaging, vibration sensing, gas spectroscopy, and communication, are demonstrated. THz channel characterization using a pulse radiator is also presented. We conclude the paper with a discussion on the potential for silicon-based THz generation beyond 1 THz. 

High-Power, Efficient THz Generation in Silicon for Broadband Sensing and Wireless Communication

Abstract This paper describes how moiré plasmonic nanoparticle lattices can exhibit lasing action over a broad wavelength and wavevector range. Moiré nanolithography is combined with the PEEL (Photolithography, Etching, Electron‐beam deposition, and Lift‐off) process to fabricate in‐plane incommensurate lattices with optical properties beyond the restricted geometries of Bravais lattices. Because of increased rotational symmetry, moiré lattices support a larger number of transverse electric and transverse magnetic modes relative to their periodic base lattices. It is found that multidirectional lasing characteristics can be predicted by the symmetry of the moiré reciprocal lattice. Incommensurate moiré plasmonic lattices combine advantages of the dense band structures observed in aperiodic lattices with that of predicted modes in Bravais lattices for light‐based technologies in coherent light sources and multiplexed data transfer. 

Symmetry‐Determined Lasing from Incommensurate Moiré Nanoparticle Lattices

We report a terahertz quantum-cascade vertical-external-cavity surface-emitting laser (QC-VECSEL) emitting around 1.9 THz with up to 10% continuous fractional frequency tuning of a single laser mode. The device shows lasing operation in pulsed mode up to 102 K in a high-quality beam, with the maximum output power of 37 mW and slope efficiency of 295 mW/A at 77 K. Challenges for up-scaling the operating wavelength in QC metasurface VECSELs are identified.

/pdf/tunable-quantum-cascade-vecsel-operating-at-1-9-thz-2wjkbqsr92.pdf

Tunable quantum-cascade VECSEL operating at 1.9 THz

To date, terahertz quantum-cascade vertical-external-cavity surface-emitting lasers (QC-VECSELs) have tended to oscillate in only one or two lasing modes at a time. This is due to the fact that the interaction between all of the longitudinal external cavity modes and the QC gain material is mediated through a single metasurface resonance, whose spatial overlap changes little with frequency; this suppresses spatial-hole-burning induced multi-mode operation. In this Letter, a VECSEL external cavity is demonstrated using an output coupler based upon a high-resistivity silicon etalon, which presents a periodic reflectance spectrum that is nearly matched with the external cavity mode spectrum. As the cavity length is varied, a systematic transition between a single/double-mode lasing regime and a multi-mode lasing regime is realized due to the Vernier effect. Up to nine modes lasing simultaneously with a free-spectral-range of approximately 21 GHz is demonstrated. This result provides a path toward the multi-mode operation necessary for eventual frequency comb operation.

/pdf/multi-mode-lasing-in-terahertz-metasurface-quantum-cascade-521fmkbpip.pdf

Multi-mode lasing in terahertz metasurface quantum-cascade VECSELs

We report continuous wave (cw) operation of a terahertz quantum-cascade vertical-external-cavity surface-emitting laser with an external cavity length of approximately 30 mm, benefited by an intra-cryostat focusing cavity. Compared to previous plano–plano cavities, an off-axis paraboloid mirror is introduced into the external cavity as a focusing element to reduce the diffraction loss and to enable cw lasing using small-area metasurfaces and long cavity lengths. The device shows lasing operation in the cw mode up to 111 K, and cw output power up to 11.5 mW at 77 K (0.5% wall-plug efficiency). A circular, directive beam pattern is collected, and free-running linewidths on the order of tens of kHz are measured over tens of seconds. 

/pdf/continuous-wave-operation-of-terahertz-metasurface-quantum-23xi4pdo.pdf

Continuous wave operation of terahertz metasurface quantum-cascade VECSEL with a long intra-cryostat cavity

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Tunable quantum-cascade VECSEL operating at 1.9 THz

Multi-mode lasing in terahertz metasurface quantum-cascade VECSELs

Continuous wave operation of terahertz metasurface quantum-cascade VECSEL with a long intra-cryostat cavity