The fundamentals and applications of ferroelectric HfO2

We demonstrate ferroelectric (FE) memory transistors on a crystalline silicon channel with endurance exceeding 1010 cycles. The ferroelectric transistors (FeFETs) incorporate a high- $\kappa $ interfacial layer (IL) of thermally grown silicon nitride (SiNx) and a thin 4.5 nm layer of Zr-doped FE-HfO2 (HZO) on a ~30 nm silicon on insulator (SOI) channel. The device shows a ~1V memory window (MW) in a DC sweep of just ± 2.5V, and can be programmed and erased with voltage pulses of $\text {V}_{\text {G}}= \pm \,\,3\text{V}$ at a pulse width of 250 ns. The device also shows very good retention behavior. These results indicate that appropriate engineering of the IL layer could substantially improve FeFET device performance and reliability.

Ferroelectric HfO 2 Memory Transistors With High- κ Interfacial Layer and Write Endurance Exceeding 10 10 Cycles

Wurtzite and fluorite ferroelectric materials for electronic memory

Wakeup-free and endurance-robust HfZrO2 (HZO) ferroelectric field-effect transistor (FeFET) was fabricated on a silicon-on-insulator substrate. After a high-pressure forming gas annealing as the last alloy step, the performance and endurance of the FeFETs were significantly improved by trap states reduction, polarization enhancement, and wake-up elimination. As the result, the FeFETs show superior endurance exceeding 1010 cycles and robust retention behavior at program/erase biases of ±3.5V and pulse width of 100 ns. These results indicate that appropriate thermal treatment for the interlayer and ferroelectric material could substantially improve FeFET performance and reliability.

Wakeup-Free and Endurance-Robust Ferroelectric Field-Effect Transistor Memory Using High Pressure Annealing

Silicon ferroelectric field-effect transistors (FeFETs) with low-k interfacial layer (IL) between ferroelectric gate stack and silicon channel suffers from high write voltage, limited write endurance and large read-after-write latency due to early IL breakdown and charge trapping and detrapping at the interface. We demonstrate low voltage, high speed memory operation with high write endurance using an IL-free back-end-of-line (BEOL) compatible FeFET. We fabricate IL-free FeFETs with 28nm channel length and 126nm width under a thermal budget <400C by integrating 5nm thick Hf0.5Zr0.5O2 gate stack with amorphous Indium Tungsten Oxide (IWO) semiconductor channel. We report 1.2V memory window and read current window of 10^5 for program and erase, write latency of 20ns with +/-2V write pulses, read-after-write latency <200ns, write endurance cycles exceeding 5x10^10 and 2-bit/cell programming capability. Array-level analysis establishes IL-free BEOL FeFET as a promising candidate for logic-compatible high-performance on-chip buffer memory and multi-bit weight cell for compute-in-memory accelerators. 

/pdf/logic-compatible-high-performance-ferroelectric-transistor-2p0znd13.pdf

Logic Compatible High-Performance Ferroelectric Transistor Memory

Scaled ferroelectric transistors (L g =76 nm) in a back- gated configuration are fabricated with a channel-last process flow. Using this approach, optimization of the ferroelectric gate oxide film can be decoupled from that of the semiconductor channel to reduce parasitic interfaces. As a result, ferroelectric transistors with 3σ memory window for fast programming time of 10 ns (including an instantaneous read-after-write) at 1.8 V and high endurance of 1012 cycles are demonstrated for the first time.

High Speed Memory Operation in Channel-Last, Back-gated Ferroelectric Transistors

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High Speed Memory Operation in Channel-Last, Back-gated Ferroelectric Transistors