Microelectromechanical system (MEMS) reveals excellent flexibility and adaptability in miniaturization devices owing to its compact dimension, low power consumption, and fine performance As a typical type of miniaturization tool, MEMS-based robotic microgripper has been widely employed in the manipulation of tiny micro-objects, material characterizations, and so on This paper presents the state-of-the-art survey of prevalent MEMS-based actuation and sensing techniques, which can be applied in microgrippers Five main types of actuators are reviewed in this survey, namely, electro-thermal actuators, electrostatic actuators, shape memory alloy actuators, piezoelectric actuators, and electromagnetic actuators A review of recent sensing techniques is also conducted, which includes four popular sensing approaches in terms of capacitive sensors, electrothermal sensors, piezoresistive sensors, and piezoelectric sensors Their advantages, disadvantages, and applications have been discussed in detail Some perspectives on the future development are presented

A review on actuation and sensing techniques for MEMS-based microgrippers

The port-Hamiltonian (pH) theory for distributed parameter systems has developed greatly in the past two decades. The theory has been successfully extended from finite-dimensional to infinite-dimensional systems through a lot of research efforts. This article collects the different research studies carried out for distributed pH systems. We classify over a hundred and fifty studies based on different research focuses ranging from modeling, discretization, control and theoretical foundations. This literature review highlights the wide applicability of the pH systems theory to complex systems with multi-physical domains using the same tools and language. We also supplement this article with a bibliographical database including all papers reviewed in this paper classified in their respective groups.

Twenty years of distributed port-Hamiltonian systems: a literature review

A Comprehensive Survey on Microgrippers Design: Mechanical Structure

Microgrippers with integrated force sensors are very efficient tools for dexterous manipulation of objects in the microworld (size less than 100 μm). In this paper, we first propose a modeling approach of a nonlinear electrostatic microgripper with integrated force sensor while handling calibrated microglass balls of 80- μm diameter. Limit of the linear operating range of the microgripper is investigated and a nonlinear model is proposed and validated experimentally for large displacements. We then propose the design of an optimal force feedback controller to ensure reliable handling operations with appropriate gripping forces. To overcome the limitation caused by the low signal-to-noise ratio provided by the sensor, a Kalman filter is used to estimate the states of the process from noise measurements. The control law is implemented and validated using real-time experiments for 10 μN gripping force reference with a noise level (peak-to-peak magnitude of the noise) reaching 8 μN in the worst case. The effectiveness of the optimal filter is proven by comparison with external interferometric measurements.

https://hal.archives-ouvertes.fr/hal-00874563/document

Modeling and Optimal Force Control of a Nonlinear Electrostatic Microgripper

A Comprehensive Survey on Microgrippers Design: Operational Strategy

MEMS-based microgrippers with integrated force sensor have proved their efficiency to perform dexterous micromanipulation tasks through gripping forces sensing and control. For force control, knowledge based models are more relevant and gives better physical significance than the use of black box models. However this approach is often limited by many problems commonly encountered in the MEMS (micro electromechanical systems) structures such as: complex architectures, nonlinear behaviors and parameters uncertainties due to fabrication process at the micrometer scale. For these reasons theoretical approaches must be compared with experiments. This paper describes a modelling approach of a MEMS-based microgripper with integrated force sensor while handling micro-glass balls of 80µm diameter. Therefore, a state space representation is developed to couple both the dynamics of the actuation and sensing subsystems of the gripper through the stiffness of the manipulated object. A knowledge based model is obtained for small displacements at the tip of the gripper arms (small gripping forces) and is compared with experimental approaches. Good agreements are observed allowing interesting perspectives for the control.

/pdf/modelling-of-a-mems-based-microgripper-application-to-ffk56b9i7i.pdf

Modelling of a MEMS-based microgripper: application to dexterous micromanipulation

Parabolic matching of hyperbolic system using Control by Interconnection

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Modelling of a MEMS-based microgripper: application to dexterous micromanipulation

Parabolic matching of hyperbolic system using Control by Interconnection