This paper investigates the design and analysis of resonator for the resonant accelerometer. The difference in the resonator resonant frequency in driving and sensing mode and the resonator sensitivity were found to be key factors in determining the performance of the resonant accelerometer. The methodology suggests a simple way of designing and analyzing the resonator. Firstly, the three structural parameters that the width b, the thickness h and the length L of the resonant beam were optimized. And the sensitivity of the resonator to the axial force is related to the three structural parameters. Moreover, simulations of resonator performance are achieved using ANSYS finite element software. The simulation results show that the sensitivity of the resonator 1 is 3.35 Hz/μN, the sensitivity of the resonator 2 is 4.06 Hz/μN. At the same time, the linear degree of sensitivity of the resonator 1 is better than that of the resonator 2.

Design and Analysis of Resonator for the Resonant Accelerometer

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Design and Analysis of Resonator for the Resonant Accelerometer