Detecting the direction of sound wave propagation using conventional acoustic hydrophones can be challenging, as they are omnidirectional and only measure the magnitude of sound pressure. However, vector hydrophones offer a solution to this problem, which enables the determination of both magnitude and direction of sound waves. In this study, we propose a novel structure for a vector hydrophone that consists of two cymbal transducers attached to a hollow cylindrical frame, positioned facing each other. Initially, we analyze the received voltage sensitivity of the two cymbal transducers and evaluate the suitability of the structure as a vector hydrophone by implementing a dipole mode beam pattern. Furthermore, we investigate the impact of structural parameters on the performance of the vector hydrophone. Based on these findings, we derive the optimal structure for the vector hydrophone, maximizing its sensitivity. Finally, we validate the design by manufacturing a prototype of the cymbal vector hydrophones and comparing their measured performance with the calculated values. 

Development of a high-performance cymbal vector hydrophone

The main frequency band of the radiated signals from ships is 20–500 Hz and also the main working frequency band of the micro-electromechanical systems (MEMS) vector hydrophone. To improve sensitivity in this frequency band, this article presents a nested package structure, which encapsulates the sensitive sections of the vector hydrophone with a mesh-like interior support and a sound-transparent cap. By COMSOL Multiphysics 6.0 simulation, the particle acceleration and intrinsic frequency of the hydrophone with different interior supports and sound-transparent cap are compared and analyzed. The simulation results show that the hydrophone encapsulated with nylon interior support and latex acoustic cap has higher acceleration, and its intrinsic frequency is 2285.1 Hz in air and 804.64 Hz underwater. The results of the testing indicate that the nested package hydrophone designed in this article has a bandwidth of 10–800 Hz, meeting the main working frequency band of the hydrophone. Additionally, the sensitivity of the hydrophone with latex encapsulation is increased by 7.8 dB at 100 Hz than polyurethane encapsulation. The depth of the notch at 100 and 500 Hz is more than 30 dB, which indicates that the hydrophone has good dipole directivity. Compared with the traditional polyurethane-packaged hydrophone, the nested package structure can effectively improve the performance of the hydrophone.

Research on the nested package structure of a MEMS vector hydrophone

This paper presents the design methodology, fabrication process, and experiment evaluation of a bionic vector turbulence sensor with enhanced reliability. Specifically, a stress-dispersed cilium-beam sensitive structure with excellent mechanical robustness is developed by optimizing the stress concentration region on the beam. Compared to conventional sensitive elements, a significant increase in the failure limit can be achieved. The bullet-shaped package structure achieves high-pressure resistance by employing a double water-tightness approach. In particular, the design of open front fairwater prevents excessive cilium displacement caused by overload. The calibration results indicate that the sensor’s sensitivity reaches 1.06×10-2 (V·m·s2)/kg. The marine environment adaptability, reliability, and stability of the sensors are systematically evaluated. Furthermore, a field test is performed in the real environment. The obtained results suggest that the reported sensor exhibits robust performance. This investigation paves the way for the technological maturity and practical application of the MEMS turbulence sensor. 

Development of a Stress-Dispersed MEMS Bionic Turbulence Sensor with Enhanced Reliability

Abstract To solve the problems of low sound pressure sensitivity and narrow operating bandwidth of hydrophones, this paper proposes a MEMS piezoelectric hydrophone with a corrugated structure substrate. This design is improved from two aspects, on the one hand, the MEMS technology is used to make the aluminum oxide substrate into a corrugated structure, the corrugated structure can make the hydrophone work with better linearity, and at the same time broaden the hydrophone's operating bandwidth; on the other hand, the array design is utilized to improve the sound pressure sensitivity by integrating four identical sensitive cores in the same piece of hydrophone. The test results show that the sound pressure sensitivity of the MEMS piezoelectric hydrophone of this design is better than -207.6 dB in the operating bandwidth of 10~3800 Hz, and reaches the highest -195.5 dB sound pressure sensitivity at the input signal frequency of 2500 Hz. 

A MEMS piezoelectric hydrophone with high sensitivity and wide bandwidth

Design of ciliated MEMS vector hydrophone based on stainless steel mesh cap

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Design of ciliated MEMS vector hydrophone based on stainless steel mesh cap