22 Papers
88 Citations
Wei Li is an academic researcher from Colorado State University. The author has contributed to research in topics: Lithography & Extreme ultraviolet lithography. The author has an hindex of 10, co-authored 22 publications.
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Papers
Spin–orbit torque-assisted switching in magnetic insulator thin films with perpendicular magnetic anisotropy
Peng Li,Tao Liu,Houchen Chang,Alan Kalitsov,Wei Zhang,György Csaba,Wei Li,Daniel Richardson,August DeMann,Gaurab Rimal,Himadri Dey,J. S. Jiang,Wolfgang Porod,Stuart B. Field,Jinke Tang,Mario C. Marconi,Axel Hoffmann,Oleg N. Mryasov,Mingzhong Wu +18 more
TL;DR: The SOT-assisted switching in heavy metal/magnetic insulator systems is reported and can reduce or increase the switching field of the BaFe12O19 film by as much as about 500 Oe when the film is switched with an out-of-plane field.
Extreme ultraviolet Talbot interference lithography.
Wei Li,Mario C. Marconi +1 more
TL;DR: This paper describes a hybrid extreme ultraviolet lithography approach that combines Talbot lithography and interference lithography to render an interference pattern with a lattice determined by a Talbot image, and enables filling the arbitrary shaped cells produced by the Talbots with interference patterns.
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Defect tolerant extreme ultraviolet lithography technique
L. Urbanski,Wei Li,Jorge J. Rocca,Carmen S. Menoni,Mario C. Marconi,Artak Isoyan,Aaron Stein +6 more
TL;DR: In this article, a defect tolerant method of printing periodic structures with submicron resolution is presented based on the self-imaging effect produced when a periodic semi-transparent mask is illuminated with coherent light.
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Defect-free periodic structures using extreme ultraviolet Talbot lithography in a table-top system
Wei Li,Victor Martinez Esquiroz,L. Urbanski,Dinesh K. Patel,Carmen S. Menoni,Mario C. Marconi,Aaron Stein,Weilun Chao,Erik H. Anderson +8 more
TL;DR: In this paper, a compact nanofabrication system that combines Talbot lithography and a table-top extreme ultraviolet laser is presented, which is capable of printing periodic structures over millimeter square areas free of defects.
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