Bubbles in liquids can be formed in a variety of ways. A convenient method to produce a single bubble in a liquid is to focus a short pulse of laser light into the liquid. A bright light‐emitting plasma of obviously high pressure expands forming a gas‐vapor bubble. After some time bubble expansion stops at some maximum radius. From thereon the bubble starts to shrink driven by the ambient pressure and leading to a violent collapse possibly followed by rebounds. A mathematical model that describes the evolution of such a laser‐induced cavitation bubble is presented. The model takes into account heat conduction of the liquid and gas phases, evaporation and condensation processes of the liquid phase, gas diffusion from the liquid into the bubble, and compressibility of the liquid. A reasonable comparison of theoretical results with experimental data is obtained. [Work partially supported by Internationales Buro des BMBF (Contract RUS‐133‐1997) and European Commission (INCO‐Copernicus, Contract ERBIC15CT980141).]

Dynamics of laser‐induced cavitation bubbles

Edge Trimming Induced Defects on Direct Bonded Wafers

The laser-induced cavitation bubble collapse sound waves in viscous liquid are measured by the PZT hydrophone.In combination with analyzing the maximum bubble radius and oscillating duration influenced by the gas content and kinematic viscosity in viscous liquid,the sound waves spectrum properties influenced by the gas content and kinematic viscosity are investigated by experiment.The results indicate that the gas content decreases with the increase of kinematic viscosity under the same laser energy.The longer the oscillating duration,the smaller the maximal bubble radius,and the frequency peak trends higher direction.

Influence of gas content on spectrum properties of laser-induced cavitation bubble collapse sound waves in viscous liquid

Transparent brittle materials such as glass and sapphire are widely concerned and applied in consumer electronics, optoelectronic devices, etc. due to their excellent physical and chemical stability and high transparency. Laser induced backside wet/dry etching (LIBWE or LIBDE) refers to the technique of applying absorber (liquid or solid layers) on the rear surface of workpiece and then focusing the beam on the liquid-solid interface for machining. High aspect ratio microgrooves and various microstructure are fabricated on glass and sapphire substrates quickly and accurately, which has been proved to be an effective and flexible way to process all kinds of transparent brittle materials with high-precision and highquality. The removal mechanism and model are revealed by considering the physical phenomenon like plasma, cavitation, micro-jet, etc. Additionally, applications of these techniques in micromachining, patterning, microfluidic, and microcircuit are introduced in detail.

Laser-induced backside wet/dry etching microstructures on transparent and brittle materials

An underwater detector was designed based on the technology of laser-induced sound by underwater explosion. The mechanism of underwater explosion sound by laser was studied, and then the detecting experimental system was built. The experimental results show that the laser-induced sound signal might be produced by high-power pulse laser breakdown under water, and that the spherical laser-induced sound signal can be changed into the plane wave signal by the acoustic reflector inside the detector. The laser-induced sound signals from the detector are found to have the characteristics of narrow-beam direction, high range resolution and long detection range by numerical calculation, which meet the requirement of underwater detection.

Detecting technology based on laser-induced sound by underwater explosion

Liquid-assisted laser machining is a composite manufacturing technology. Depending on its unique cha-racteristics and advantages, it already has been received widely attention and applications in the field of manufacturing. The technology has become a hot spot in the interaction between laser and liquid medium. In this paper, the research status of shock wave and high-speed micro-jet pressure in liquid-assisted laser process is reviewed. The mechanism, the basic characteristics of pressure and the factors that affect the pressure in the process of liquid-assisted laser machining are resumed. The research method and the latest progress of the pressure phenomenon in the laser wet machining are mainly introduced. The advantages and disadvantages of these pressure detection methods are summarized. Finally, the applications of liquid-assisted laser machining in related fields are introduced and the prospects of this technology are summarized.

[Opto-Electron Eng, 2017, 44(4)] Research progress of pressure detection and applications in liquid-assisted laser machining

Simulation Research on Micro Contact Based on Force in Silicon Wafer Rotation Grinding

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[Opto-Electron Eng, 2017, 44(4)] Research progress of pressure detection and applications in liquid-assisted laser machining

Simulation Research on Micro Contact Based on Force in Silicon Wafer Rotation Grinding