W. Guo
5 Papers
W. Guo is an academic researcher. The author has contributed to research in topics: Sputtering & Silicon. The author has an hindex of 1, co-authored 3 publications.
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Papers
Effect of ion assistance on silicon nitride films deposited by reactive magnetron sputtering
TL;DR: In this article , the optical properties and composition of silicon nitride films were investigated using reactive magnetron sputtering, during which ion assistance was introduced, and the results showed that optical properties such as refractive index and extinction coefficient were significantly affected by ion assistance.
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Widely tunable refractive index silicon nitride films deposited by ion-assisted pulsed DC reactive magnetron sputtering
TL;DR: In this paper , a method for depositing amorphous silicon nitride films with a widely tunable refractive index range was proposed, which is promising for the application of optical thin films and waveguides.
6
Broadband antireflective coatings in the optical communication band deposited by ion-assisted reactive magnetron sputtering
TL;DR: In this article , the authors employed Silica and silicon nitride with tunable refractive index in anti-reflection coatings, which were deposited by ion-assisted reactive magnetron sputtering and showed that the average reflectance of 0.74% for single-layer coatings and below 0.12% after optimization for each sub-band was achieved.
5
Nb2O5 Deposited by Ion-Assisted Reactive Magnetron Sputtering for Near-Infrared Optical Coating: Power Modulation and Performance Degradation
Daoming You,Yu Jiang,Yinchun Cao,Yali Zhao,W. Guo,Manqing Tan +5 more
- 01 Nov 2023
TL;DR: Nb2O5 deposited by ion-assisted reactive magnetron sputtering exhibits excellent near-infrared optical properties, with optimal deposition achieved at 450-600 W, but undergoes significant performance degradation above 450-550 °C due to crystallization and increased defects.
3
High-performance SiO2-SiNx distributed Bragg reflectors fabricated by ion-assisted reactive magnetron sputtering
Yu Jiang,Daoming You,Yingchun Cao,W. Guo,Manqing Tan +4 more
TL;DR: Researchers fabricated high-performance SiO2-SiNx distributed Bragg reflectors using ion-assisted reactive magnetron sputtering, achieving smooth surfaces, low residual stresses, and broadband high reflection (>99.9%) with a stopband bandwidth of 800-1150 nm.