This paper reports the first demonstration of a multi-material, fully additively manufactured, miniature diaphragm pump for creation and maintenance of low vacuum from atmospheric conditions. Using polyjet 3-D printing technology with $42~\mu \text{m}$ XY pixelation and $16~\mu \text{m}$ or $25~\mu \text{m}$ tall voxels, a single-stage vacuum pump design with active valves that has a total pumping volume of 1 cm3 with 5% dead volume was implemented. Optimization of the devices resulted in manufacturing different constitutive parts of the pump in flexible materials of different stiffness. Finite element simulations of the pump design estimate at 0.20 MPa the maximum stress on the piston diaphragm root at full actuation, and at 106 Hz the natural frequency of the compression chamber. While operating at 1.82 Hz, the devices consistently pumped down from atmospheric pressure to 110 Torr in under 4 s, which is the smallest and fastest base pressure reported in the literature for a microfabricated diaphragm vacuum pump. In addition, the pumps can deliver mass flow rates as high as 200 sccm at 535 Torr, which is much higher than any of the reported flow rates from a diaphragm vacuum pump manufactured with standard microfabrication. The outgassing rate of the TangoBlack Plus® photopolymer used to print the pumps was measured and is on par with vacuum compatible elastomers. Compression chamber diaphragms exhibited lifetimes approaching 1 millioncycles, while the valves membranes have not leaked after over 2 million cycles. [2017-0100]

Miniaturized Diaphragm Vacuum Pump by Multi-Material Additive Manufacturing

https://robots.iopscience.iop.org/article/10.1088/1361-6463/ab8de8/pdf

Compact, magnetically actuated, additively manufactured pumps for liquids and gases

This paper is the first comprehensive review on microelectromechanical systems (MEMS) vacuum pumps. Pumping of gases and generation of vacuum in micro-scaled devices are topics that have been quite rarely discussed in the literature. For years, attention was paid only to fluidic micropumps. In recent years, the situation has changed; these problems have become more and more important now. There is a big interest in miniature portable vacuum devices and analytical instruments, which all need to be equipped with miniature vacuum pumps. Different types of vacuum pumps operating on different principles and in different pressure ranges have been miniaturized so far: membrane, rotary, turbomolecular, diffusion, and sorption. All of them are described in this paper. The greatest interest is to put recent achievements, solutions, and possible applications, but also their limitations are discussed as well. [2016-0213]

MEMS Vacuum Pumps

This paper presents a new high-density, scalable, peristaltic gas micropump, fabricated using a high-yield and modular technology. Previously our group introduced the first peristaltic electrostatic gas micropump, utilizing fluidic resonance and multi-stage configuration, which achieved the highest pressure and flow at the lowest power ever reported for a gas micropump. The micropump reported here utilizes the same operating principle, but with major modifications in device structure, architecture, fabrication technology, and pump assembly and packaging. The new pump is significantly more space efficient than the previous design and can be fabricated on one single sided silicon wafer and assembled modularly (in parts), providing much greater testing and characterization capabilities at different points in the process, as well as a significantly higher yield and better control over critical pump parameters.

/pdf/a-scalable-modular-multi-stage-peristaltic-electrostatic-gas-2uguy920ou.pdf

A scalable, modular, multi-stage, peristaltic, electrostatic gas micro-pump

This paper introduces a new class of compact, highly scalable and efficient membrane-based gas micropumps in which both stroke and flow-control actions are realized by checkerboard microvalves. Realized based on a novel scalable and modular microfabrication technology, the micropump reported here utilizes an unwanted secondary pumping effect, valve pumping, as the main pumping principle, eliminating the need for any pumping membrane. This reduces down the entire pumping structure to a collection of active microvalves, and hence, significantly simplifies the configuration and operation of mechanical gas micropumps and minimizes their dead volume (often the Achilles heel for gas micropumps). Valve-only pumping can produce a flow rate as high as 160 μL/min using only two valve membranes and pressure accumulations of 500 Pa, for a 4-stage device, while it also improves the total device size by 50%.

Valve-only pumping in mechanical gas micropumps

We are developing a micromachined vacuum pump for portable analytical instruments that is comprised of a mechanical roughing pump integrated with a micro-machined ion pump. The focus of this paper is on the development of the roughing pump. We have fabricated two generations of micromachined displacement vacuum pumps to explore various design options. Through optimization of design and operation, we can now report a pump that achieves 164 torr absolute pressure, which is to our knowledge the lowest measured pressure in a micro-machined vacuum pump operated from atmospheric pressure.

A single-stage micromachined vacuum pump achieving 164 torr absolute pressure

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A single-stage micromachined vacuum pump achieving 164 torr absolute pressure