http://liu.diva-portal.org/smash/get/diva2:303552/FULLTEXT01

The Mn+1AXn phases: Materials science and thin-film processing

The Monte Carlo Program TRIM.SP (sputtering version of TRIM) was used to determine sputtering yields and energy and angular distributions of sputtered particles in physical (collisional) sputtering processes. The output is set up to distinguish between the contributions of primary and secondary knock-on atoms as caused by in- and outgoing incident ions, in order to get a better understanding of the sputtering mechanisms and to check on previous theoretical models. The influence of the interatomic potential and the inelastic energy loss model as well as the surface binding energy on the sputtering yield is investigated. Further results are sputtering yields versus incident energy and angle as well as total angular distributions of sputtered particles and energy distributions in specific solid angles for non-normal incidence. The calculated data are compared with experimental results as far as possible. From this comparison it turns out that the TRIM.SP is able to reproduce experimental results even in very special details of angular and energy distributions.

/pdf/sputtering-studies-with-the-monte-carlo-program-trim-sp-51mc7x1qma.pdf

Sputtering Studies with the Monte Carlo Program TRIM.SP

This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology.

/pdf/new-materials-for-micro-scale-sensors-and-actuators-an-21qnaonn0l.pdf

New materials for micro-scale sensors and actuators An engineering review

This article summarizes theoretical work on sputtering during the past decade, with the emphasis on elemental sputtering in the linear cascade and spike regimes as well as alloy sputtering. The sputtering of molecules and clusters, and electronic sputtering of insulators and biomolecular materials are discussed more briefly, and topics like charge and excitation states of sputtered particles as well as surface topography are left out, in view of contemporary summary papers in this issue and elsewhere. The paper is nontutorial and assumes some general knowledge of the field on the part of the reader, based e.g. on ref. [1] or ref. [2]. The discussion emphasizes principles and methods as well as open problems rather than quantitative results. A few general recommendations for efficient utilization of computer simulation conclude the paper.

Mechanisms and theory of physical sputtering by particle impact

Energy and angular distributions of sputtered particles

Measurements of angular distributions of sputtered material as a new tool for surface-segregation studies: Segregation in CuPt alloys

Design and investigation of gas cluster ion accelerator

We report neutron production by the 2H(d, n)3He reaction induced upon the illumination of a solid nanostructured target by femtosecond laser pulses of intensity 20 PW/cm2 (1 PW = 1015 W). The target was structured through the preliminary illumination by a laser pulse of the same intensity.

Neutron generation in dense femtosecond laser plasma of a structured solid target

The initial growth mode of indium tin oxide (ITO) on polycarbonate (PC) substrates was investigated. Some of the PC substrates were bombarded by 1-keV Ar ions in an oxygen environment to modify the substrate surface before ITO sputter deposition. The initial part of the film growth was transformed from a three-dimensional island growth to a two-dimensional like growth as a result of the surface treatment. The change of the growth mode was attributed to oxygen-bound functional groups newly formed on the PC surface. Models based on thermodynamic theory and on atomic kinetic approach are presented to explain the transition, respectively.

Effects of substrate treatment on the initial growth mode of indium-tin-oxide films

Gas-dynamic sources of cluster ions for solving fundamental and applied problems

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