A detailed analysis of the nonstationary behaviour of the electron kinetics for the preionized, discharge pumped excimer laser plasma has been performed solving the nonstationary electron Boltzmann equation. The nonstationary treatment of this equation is based on the conventional two-term approximation of the velocity distribution and on the quasi-stationary description of the anisotropic part of the distribution. The validity of both has been analysed. Using the atomic data of the relevant electron-heavy particle collision processes and the temporal course of the electric field in the laser discharge, the degree of nonstationarity of the energy distribution and of the consistent particle and power balance of the electrons has been critically evaluated. By applying a new and very efficient solution technique of the nonstationary kinetic equation to the typical excimer laser mixture Ne/Xe/HCl, the temporal behaviour of the energy distribution and of the corresponding particle and energy budget has been comprehensively studied. The results confirm the conclusions of the mentioned evaluation. In addition, some results concerning the impact of electron-electron interaction and the replacement of the nonstationary treatment by a quasi-stationary approximation are reported; these indicate the limitations enforced by different simplified treatments. The technique developed in this paper and applied to the particular laser plasma mentioned can be used in the modelling of other excimer laser plasmas.

A detailed study of electron kinetics involved in modelling discharge pumped excimer laser plasmas

Absolutely calibrated emission spectroscopy has been used to determine the particle number densities of XeCl*(B), XeCl*(C), and Xe2Cl* in a small scale Ne/Xe/HCl discharge with well-defined current and voltage pulses for a wide range of parameters. The measured particle number densities could be reproduced quite well by numerical model calculations using the rate-coefficient values of Quinones et al. [1] for the quenching of XeCl*(B,C) by Ne, Xe, and 2Xe, but 3.0 × 10−31 cm6/s for the formation of Xe2Cl* by (Ne + Xe)-quenching. For the electron quenching, we recommend a rate coefficient value of 3.2 × 10−8 cm3/s. From the equilibrium ratio of the particle number densities of XeCl*(C) and XeCl*(B), the energy separation between these states has been estimated to be 72 ± 33 cm−1 with the B state placed above the C state.

Experimental verification of a zero-dimensional model of the kinetics of XeCl* discharges by XeCl*(B)-, XeCl*(C)-, and Xe2Cl*-density measurements

Investigations of a compact short-pulse discharge-excited XeCl laser

Ionic recombination is the primary channel for the formation of the XeCl exciplex. However, there are two additional channels that are also important. These channels take advantage of the pseudo-crossings of two Rydberg-state potential-energy curves with the ionic curve. The three-body rate coefficients for the formation and associated reverse processes are calculated using semi-classical formulae derived on the basis of a double-crossing electron-jump model. Specific results for the,three-body ionic-recombination rates of Xe + and Cl - are compared with those obtained using classical theories

Formation of the XeCl exciplex via double crossings of potential-energy curves

For many excimer laser applications for example, in medicine and semiconductor processing, the long‐term stability of the output pulse energy and the laser‐beam profile are very important. The spatial intensity distribution of an excimer laser with a Fabry–Perot cavity depends on many discharge conditions (e.g., the loading voltage, the total gas pressure, the concentrations of the gas components, the repetition rate, the electrode profiles, and the spatial distribution of the preionization intensity). A one‐dimensional model of a discharge pumped excimer laser is described. It can be shown that the laser output power of a KrF laser depends on the spatial variations of the discharge parameters to a higher degree than does a XeCl laser. The double structure of the transverse intensity distribution for long‐term KrF laser operation can be explained as a consequence of the depletion of F2 concentration within the gas mixture after many discharges.

One‐dimensional model of discharge pumped excimer lasers

A simple theoretical analysis of the discharge characteristics and the laser output performance of a discharge - pumped XeCl-laser is described. Validity of the model is confirmed by comparing the results with the measured time histories of the discharge voltage and current as well as with measured laser-output-energies. The model allows qualitative explanations with respect to the laser output energy in dependence on the total gas pressure, the concentrations of Xe and He as well as the load voltage of the power supply and the primary stored energy.

A Simple Theoretical Analysis of a Discharge Pumped XeCl-Laser

Total collisional depopulation rates for He(n1S0) (3 ≦ n ≦ 6), He(31P1) in thermal collisions with Rb have been measured using the transient-decay method. The measured quenching cross-sections increase from 4.3 · 10−10 cm2 to 24 · 10−14 cm2 with increasing n from 3 to 6.

Comparison of experimental results with theoretical estimations shows that the main processes of quenching depend on n. He-atoms in the n = 3, 4 states are mainly quenched by Penning ionisation and higher excited states by collisional l-mixing.

Desaktivierung angeregter He‐Atome (31P1, 31S0, 41S0, 51S0, 61S0) durch Rb‐Atome

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A Simple Theoretical Analysis of a Discharge Pumped XeCl-Laser

Desaktivierung angeregter He‐Atome (31P1, 31S0, 41S0, 51S0, 61S0) durch Rb‐Atome