Tyler A. Lowrey
Micron Technology
179 Papers
7K Citations
Tyler A. Lowrey is an academic researcher from Micron Technology. The author has contributed to research in topics: Layer (electronics) & Transistor. The author has an hindex of 43, co-authored 179 publications. Previous affiliations of Tyler A. Lowrey include University of Rochester & Intel.
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Papers
Patent
Semiconductor gettering process using backside chemical mechanical planarization (CMP) and dopant diffusion
Tyler A. Lowrey,Trung T. Doan,Gurtej S. Sandhu +2 more
- 18 Dec 1991
TL;DR: In this article, a gettering process for semiconductor manufacturing is described, which includes thinning and roughening a backside of the wafer using chemical mechanical planarization (CMP).
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Patent
Split-polysilicon CMOS process incorporating unmasked punchthrough and source/drain implants
Tyler A. Lowrey,Randal W. Chance,Ward D. Parkinson +2 more
- 27 Oct 1989
TL;DR: In this article, an improved CMOS fabrication process which uses separate masking steps to pattern N-channel and P-channel transistor gates from a single layer of conductively-doped polycrystalline silicon (poly).
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Patent
Sidewall silicidation for improved reliability and conductivity
Roger R. Lee,Fernando Gonzalez,Tyler A. Lowrey +2 more
- 14 May 1992
TL;DR: In this paper, a process and structure for improving the conductive capacity of a polycrystalline silicon (poly) structure, such as a bit line, is described. But this process requires the use of refractory metal silicide on the top and sidewalls of the poly structure.
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Patent
Method of forming a low resistive current path between a buried contact and a diffusion region
Martin C. Roberts,Tyler A. Lowrey +1 more
- 30 Jun 1994
TL;DR: In this article, a static random access memory fabrication process for forming a buried contact is described. But the implant is inserted in the field silicon dioxide regions and the spaced apart areas of the supporting silicon substrate.
34
Patent
Sequence of etching polysilicon in semiconductor memory devices
Tyler A. Lowrey
- 02 May 1988
TL;DR: In this paper, a dymanic random access memory (DRAM) is formed by first forming a burried contact in a silicon wafer and patterning a series of transistors.
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