T. Lundquist
Credence Systems
39 Papers
366 Citations
T. Lundquist is an academic researcher from Credence Systems. The author has contributed to research in topics: Focused ion beam & Integrated circuit. The author has an hindex of 12, co-authored 39 publications.
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Papers
Patent
Sub-resolution alignment of images
Madhumita Sengupta,Mamta Sinha,T. Lundquist,William Thompson +3 more
- 30 May 2002
TL;DR: In this article, a plurality of images, including a first image and a second image having a higher resolution than the first image, are aligned by generating an oversampled cross correlation image that corresponds to relative displacements of the first and second images, and determining an offset value that correspond to a misalignment.
45
Fault localization using time resolved photon emission and stil waveforms
N. Nataraj,T. Lundquist,Ketan Shah +2 more
- 01 Sep 2003
TL;DR: If ATE detects a problem, the method presented in the paper saves time in locating the fault site by applying simulations to determine the duration and location of a meaningful measurement.
30
Patent
Charged particle guide
Qinsong Steve Wang,Tzong Tsong Miau,T. Lundquist +2 more
- 09 Jul 2004
TL;DR: In this article, a charged particle guide is adapted to be coupled with a charge detector, such as a secondary electron detector, to detect secondary electrons emitted from an IC upon application of focused ion beam.
28
Patent
Apparatus and method for optical interference fringe based integrated circuit processing
Erwan Le Roy,Chun-Cheng Tsao,T. Lundquist,Rajesh Jain +3 more
- 29 May 2007
TL;DR: In this article, a charged particle beam trench milling operation is performed in or on the substrate of an integrated circuit and interference fringes are formed from the constructive or destructive interference between the light reflected from the floor and the light from the circuit structures.
24
Patent
Apparatus and method for integrated circuit design for circuit edit
Hitesh Suri,Tahir Malik,T. Lundquist +2 more
- 08 Oct 2008
TL;DR: In this article, the authors present a method and apparatus for optimizing an integrated circuit design for post-fabrication circuit editing and diagnostics, using a charged-particle beam tool.
23