Suping Liu
1 Papers
11 Citations
Suping Liu is an academic researcher. The author has contributed to research in topics: Hydrofluoric acid & Layer (electronics). The author has an hindex of 1, co-authored 1 publications.
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Papers
Patent
Preparation method of flexible mask plate
Qiong Qi,Cong Xiong,Suping Liu,Xiaoyu Ma +3 more
- 24 Oct 2012
TL;DR: In this paper, a method consisting of growing a SiO2 layer on a substrate, precipitating a polymer layer on the SiO 2 layer, forming hollow mask patterns on the polymer layer, immersing the substrate of the polymeric layer containing the hollow mask pattern into a mixed solution containing hydrofluoric acid and ammonium fluoride, and reacting the Si O2 layer with the mixed solution to peel the polymers from the substrate, so as to form a flexible mask plate.
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