Sunjoon Park
Pusan National University
13 Papers
43 Citations
Sunjoon Park is an academic researcher from Pusan National University. The author has contributed to research in topics: Chemical-mechanical planarization & Composite number. The author has an hindex of 6, co-authored 13 publications.
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Papers
Evaluation for micro scale structures fabricated using epoxy-aluminum particle composite and its application
TL;DR: In this paper, the effects of particle size on the characteristics of composite was carried out and it was found that the epoxy composite having larger size particle was more conducive to heat transfer than that of smaller particles.
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Replication techniques for a metal microcomponent having real 3D shape by microcasting process
TL;DR: In this paper, a helical gear made of photo-curable resin was fabricated as a master pattern by microstereolithography (MSL) technology and a silicone rubber mold was fabricated from the master pattern.
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A study on microreplication of real 3D-shape structures using elastomeric mold: from pure epoxy to composite based on epoxy
TL;DR: In this article, a master pattern was made of photo-curable epoxy using a microstereolithography technology, and then it was transferred onto an epoxy-copper particle composite.
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Signal analysis of CMP process based on AE monitoring system
TL;DR: In this paper, an acoustic emission (AE) sensor was used to measure the abrasive and molecular-scale phenomena during chemical mechanical planarization (CMP) during CMP.
Effect of contact angle between retaining ring and polishing pad on material removal uniformity in CMP process
TL;DR: In this article, the effect of the contact angle between the retaining ring and the polishing pad in chemical mechanical polishing (CMP) on the profile of the material removal rate (MRR) around the wafer edge and on the within-wafer non-uniformity (WIWNU) was investigated.
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