Simona Petroni
Istituto Italiano di Tecnologia
28 Papers
218 Citations
Simona Petroni is an academic researcher from Istituto Italiano di Tecnologia. The author has contributed to research in topics: Nitride & Piezoelectricity. The author has an hindex of 13, co-authored 28 publications. Previous affiliations of Simona Petroni include STMicroelectronics.
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Papers
Aluminum Nitride piezo-MEMS on polyimide flexible substrates
Simona Petroni,Carola La Tegola,Giuseppe Caretto,Adriana Campa,A. Passaseo,Massimo De Vittorio,Roberto Cingolani +6 more
TL;DR: In this paper, a piezoelectric transducer composed of a Molybdenum (Mo) top electrode, the Aluminum Nitride active layer and a Mo bottom electrode on a polymeric tape is reported.
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Modeling, fabrication and characterization of micro-coils as magnetic inductors for wireless power transfer
TL;DR: In this article, a planar microcoil was proposed for wireless power transfer in medical implanted devices. But the authors only considered the short-circuited turns of the two microcoils to minimize the electrical resistance.
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Flexible AlN flags for efficient wind energy harvesting at ultralow cut-in wind speed
Simona Petroni,Francesco Rizzi,Francesco Guido,Alessandro Cannavale,Teresa Donateo,Fabio Ingrosso,Vincenzo Mastronardi,Roberto Cingolani,M. De Vittorio +8 more
TL;DR: In this article, a small flag made by piezoelectric thin film on flexible polymers and whose shape resembles the dry leaves of trees, was demonstrated to operate as harvesters of energy from wind at extremely low speed.
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Tactile multisensing on flexible aluminum nitride
Simona Petroni,Francesco Guido,Bruno Torre,Andrea Falqui,Maria Teresa Todaro,Roberto Cingolani,Massimo De Vittorio +6 more
TL;DR: The integration of a polycrystalline material such as aluminum nitride (AlN) on a flexible substrate allows the realization of elastic tactile sensors showing both piezoelectricity and significant capacitive variation under normal stress.
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Patent
Method for post-etch cleans
David L. Chen,Yuh-Jia Su,Eddie Ka Ho Chiu,Maria Paola Pozzoli,Senzi Li,Giuseppe Colangelo,Simone Alba,Simona Petroni +7 more
- 13 Jul 2009
TL;DR: In this paper, a method for performing a cleaning process that provides greater cleaning efficiency with less damage to device structures is presented, where a first HO-based clean may be a de-ionized water rinse, a water vapor clean, or a plasma clean, where the plasma includes hydrogen and oxygen.
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