Simi George
University of Central Florida
30 Papers
118 Citations
Simi George is an academic researcher from University of Central Florida. The author has contributed to research in topics: Laser & Extreme ultraviolet lithography. The author has an hindex of 8, co-authored 30 publications.
Chat about Author
Papers
High conversion efficiency microscopic tin-doped droplet target laser-plasma source for EUVL
Chiew-Seng Koay,Simi George,Kazutoshi Takenoshita,Robert Bernath,Etsuo Fujiwara,Martin Richardson,Vivek Bakshi +6 more
- 06 May 2005
TL;DR: In this paper, an extreme-ultraviolet (EUV) light source using tin-doped microscopic droplet liquid targets that are generated at high-repetition rates (>30 kHz) is presented.
41
Comparative extreme ultraviolet emission measurements for lithium and tin laser plasmas.
Simi George,William T. Silfvast,Kazutoshi Takenoshita,Robert Bernath,Chiew-Seng Koay,Gregory M. Shimkaveg,Martin Richardson +6 more
TL;DR: Detailed spectroscopic studies on extreme UV emission from laser plasmas using tin and lithium planar solid targets were completed, finding the best conversion efficiency for lithium was found to be 2.2% at intensities near 7 x 10(10) W/cm(2).
33
13.5 nm EUV generation from tin-doped droplets using a fiber laser.
TL;DR: A comprehensive study of the spectral and Mo-Si mirror inband EUV emission from tin-doped droplet laser plasma targets irradiated with a single 1064 nm beam from an Yb:doped fiber laser is reported.
29
Laser plasma EUVL sources: progress and challenges
Martin Richardson,Chiew-Seng Koay,Kazutoshi Takenoshita,C. Keyser,Simi George,Somsak Teerawattansook,Moza M. Al-Rabban,Howard A. Scott +7 more
- 20 May 2004
TL;DR: The most pressing technical issue for the success of EUV lithography is the provision of a high repetition-rate source having sufficient brightness, lifetime, and with sufficiently low off-band heating and particulate emissions characteristics to be technically and economically viable as discussed by the authors.
EUV spectroscopy of mass-limited Sn-doped laser micro-plasmas
Simi George,Chiew-Seng Koay,Kazutoshi Takenoshita,Robert Bernath,Moza M. Al-Rabban,C. Keyser,Vivek Bakshi,Howard A. Scott,Martin Richardson +8 more
- 06 May 2005
TL;DR: In this article, a combined experimental theoretical program is underway to measure and interpret the detailed EUV emission spectra from laser plasmas suitable for EUVL, particularly mass-limited droplet laserplasmas.
17