Shuji Tanaka
Tohoku University
505 Papers
2.4K Citations
Shuji Tanaka is an academic researcher from Tohoku University. The author has contributed to research in topics: Wafer & Resonator. The author has an hindex of 32, co-authored 494 publications. Previous affiliations of Shuji Tanaka include University of Tokyo & Jumonji University.
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Papers
Annealing transformation of diamond-like carbon using Ni catalyst
Junji Sone,Naoto Shigeta,Katsumi Yamada,Takayuki Uchida,Shinya Yoshida,Takeshi Hayasaka,Shuji Tanaka +6 more
TL;DR: In this article, the authors considered diamond-like carbon graphitization by low-temperature annealing with a Ni catalyst, for MEMS usage with thick DLC films.
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Fabrication of a multilayer spiral coil by selective bonding, debonding and MEMS technologies
Tim Schroeder,Joerg Froemel,Shuji Tanaka,Thomas Gessner +3 more
- 01 Apr 2016
TL;DR: This paper proposes a new technique for fabricating a multilayer spiral coil that is also useful as part of electromagnetic MEMS (Micro-Electro-Mechanical Systems) actuators.
3
Low-Temperature Al-Al Thermocompression Bonding with Sn Oxidation Protect Layer for Wafer-Level Hermetic Sealing
TL;DR: In this paper, the authors describe hermetic seal wafer bonding using Al covered with thin Sn as an antioxidation layer, which is usable for wafer-level integration of LSI and MEMS in conjunction with hermetic sealing.
3
An improved tetrazolium agar medium for testing sugar fermentation in lactobacilli
TL;DR: An improved tetrazolium agar medium for testing sugar fermentation in lactobacilli is described, and colorless, fermentation-positive colonies were clearly differentiated from red, fermentation -negative colonies.
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