Shuji Tanaka
Tohoku University
505 Papers
2.4K Citations
Shuji Tanaka is an academic researcher from Tohoku University. The author has contributed to research in topics: Wafer & Resonator. The author has an hindex of 32, co-authored 494 publications. Previous affiliations of Shuji Tanaka include University of Tokyo & Jumonji University.
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Papers
Effects of Reynolds number and tip clearances on the performance of a centrifugal compressor at micro scale
Kousuke Isomura,Susumu Teramoto,Shin Ichi Togo,Kousuke Hikichi,Yuki Endo,Shuji Tanaka +5 more
- 01 Jan 2006
TL;DR: In this article, the performance of a 10mm diameter centrifugal compressor at micro-scale has been evaluated by a combination of experiments and numerical calculations, and the results showed that the rate of efficiency reduction due to the increase of the tip clearance is within the range of the data that Pampreen [5] used to construct his model.
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Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film
TL;DR: A simple micro-machined pressure sensor, based on the stress-impedance (SI) effect, was fabricated herein using typical micro-fabrication technologies and has the potential for application as a cheap pressure sensor.
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Printing Sub-100 Nanometer Features Near-Field Photolithography
Shuji Tanaka,Masayuki Nakao,Yotaro Hatamura,Masanori Komuro,Hiroshi Hiroshima,Masahiro Hatakeyama +5 more
- 13 Jul 1998
TL;DR: In this article, a near-field photolithographic method which can realize ultra high resolution beyond the diffraction limit of light is described, where evanescent light generated on a transparent mold with a micro-relief illuminated on the condition of total internal reflection is used to expose a photoresist in contact with the mold.
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High frequency resonators with wide bandwidth using SH 0 mode plate wave in thin LiNbO 3
Michio Kadota,Masayoshi Esashi,Shuji Tanaka,Yasuhiro Kuratani,Tetsuya Kimura +4 more
- 21 Jul 2013
TL;DR: In this paper, high frequency SH0 mode plate wave resonators with a wide bandwidth and a large impedance ratio and without ripples have been fabricated using an ultrathin LiNbO3 plate and an apodized interdigital transducer.
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