Shuji Tanaka
Tohoku University
505 Papers
2.4K Citations
Shuji Tanaka is an academic researcher from Tohoku University. The author has contributed to research in topics: Wafer & Resonator. The author has an hindex of 32, co-authored 494 publications. Previous affiliations of Shuji Tanaka include University of Tokyo & Jumonji University.
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Papers
Wafer-to-wafer selective flip-chip transfer by sticky silicone bonding and laser debonding for rapid and easy integration test
Shuji Tanaka,M. Yoshida,Hideki Hirano,T. Somekawa,M. Fujita,Masayoshi Esashi +5 more
- 07 Mar 2013
TL;DR: Wafer-bonding-based integration can be rapidly and easily tested between different types of devices by wafer-to-wafer flip-chip transfer technology described in this paper.
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Evaluation and application of resist for alkaline wet etching
TL;DR: ProTEK PSB and ProTEK B3 (Brewer Science, Inc.) are negative type photosensitive resist and non-photosensitive resist for alkaline wet etching, respectively as mentioned in this paper.
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Vacuum test of a micro-solid propellant rocket array thruster
Kazuyuki Kondo,Shuji Tanaka,Hiroto Habu,Shinichiro Tokudome,Keiichi Hori,Hirobumi Saito,Akihito Itoh,Masashi Watanabe,Masayoshi Esashi +8 more
TL;DR: RK has no benefit for the ignition of NAB, and other kinds of ignition aid should be found, according to results of a micro-thruster tested in vacuum.
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Silicon carbide micro-reaction-sintering using a multilayer silicon mold
Shun Sugimoto,Shuji Tanaka,Jing-Feng Li,R. Watanabe,M. Esashi +4 more
- 23 Jan 2000
TL;DR: In this article, the authors describe a process, "Silicon Carbide Micro-reaction-sintering", to fabricate high-aspect-ratio silicon carbide microstructures.
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AUSN solder vacuum packaging using melted solder floodgates and laser-activated non-evaporable getters for SIC diaphragm anticorrosive vacuum sensors
Shuji Tanaka,Yutaka Honjoya,Masayoshi Esashi +2 more
- 08 Apr 2010
TL;DR: In this paper, a SiC diaphragm anticorrosive vacuum sensor was used to prevent melted AuSn solder from flowing into microstructures, e.g. capacitive gaps.
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