Shuji Tanaka
Tohoku University
505 Papers
2.4K Citations
Shuji Tanaka is an academic researcher from Tohoku University. The author has contributed to research in topics: Wafer & Resonator. The author has an hindex of 32, co-authored 494 publications. Previous affiliations of Shuji Tanaka include University of Tokyo & Jumonji University.
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Papers
Quality factor trimming method using thermoelastic dissipation for multi-ring resonator
TL;DR: In this article, a 2-axis mode-matching resonator using thermoelastic dissipation (TED) was designed so that the Q-factor is mainly limited by TED, in which the effect of energy dissipation can be tuned by mechanical trimming.
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Zero-Balance Method for Evaluation of Sealed Cavity Pressure Down to Single Digit Pa Using Thin Silicon Diaphragm
TL;DR: In this paper, a zero-balance method was proposed to evaluate the sealed cavity pressure of a micro-package using a thin diaphragm, which is identical to the surrounding pressure when the diaphrasm separating both volumes becomes flat.
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Feedback control of thin film PZT MEMS actuator with integrated buried piezoresistors
TL;DR: In this paper, a thin-film PZT MEMS actuator feedback controlled with integrated buried piezoresistors is reported, where two PID controllers are used to implement a phase-locked loop (PLL) with automatic gain control (AGC).
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A micro-fuel processor with trench-refilled thick silicon dioxide for thermal isolation fabricated by water-immersion contact photolithography
TL;DR: In this paper, a micro-fuel processor to produce hydrogen for micro fuel cells was presented. But the conversion rate of methanol to hydrogen by steam reforming was lower than 1% due to uneven temperature distribution and channeling effect.
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Antisymmetric-mode lamb wave methanol sensor with edge reflectors for fuel cell applications
Ryunosuke Hino,Masayoshi Esashi,Shuji Tanaka +2 more
- 08 Apr 2010
TL;DR: In this paper, a Lamb wave sensor was designed and evaluated to measure the concentration of methanol solution in direct methanoline fuel cell (DMFC) systems, and the sensor piezoelectrically generates the lowest antisymmetric mode (A0-mode) Lamb wave on a suspended thin AlN/SiO 2 /Si composite membrane, and confines a standing wave with edge reflectors.
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