Shuji Tanaka
Tohoku University
505 Papers
2.4K Citations
Shuji Tanaka is an academic researcher from Tohoku University. The author has contributed to research in topics: Wafer & Resonator. The author has an hindex of 32, co-authored 494 publications. Previous affiliations of Shuji Tanaka include University of Tokyo & Jumonji University.
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Papers
Thin palladium membrane microreactors with oxidized porous silicon support and their application
TL;DR: In this article, a MEMS (micro electro mechanical system)-based thin palladium (Pd) membrane microreactor with oxidized porous silicon (PS) support was developed for hydrogen purification and hydrogenation.
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Integration of Boron-Doped Diamond Microelectrode on CMOS-Based Amperometric Sensor Array by Film Transfer Technology
Takeshi Hayasaka,Shinya Yoshida,Kumi Y. Inoue,Masanori Nakano,Tomokazu Matsue,Masayoshi Esashi,Shuji Tanaka +6 more
TL;DR: In this paper, a complementary metal oxide semiconductor (CMOS)-based $20 × 20$ amperometric sensor array integrated with boron-doped diamond (BDD) microelectrodes was presented.
15
Solidly mounted resonator using shear horizontal mode plate wave in LiNbO 3 plate
Michio Kadota,Shuji Tanaka +1 more
- 09 May 2016
TL;DR: In this article, a solidly mounted resonator (SMR) structure was applied to SH mode plate resonators to obtain large k2 and spurious-free response by finite element method (FEM) simulation.
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Near-Zero TCF of HAL SAW Resonator with LiTaO 3 -on-Quartz Structure
Michio Kadota,Yoshimi Yunoki,Takehito Shimatsu,Miyuki Uomot,Shuji Tanaka +4 more
- 21 May 2018
TL;DR: In this paper, a new type of hetero acoustic layer (HAL) surface acoustic wave (SAW) resonators using a $0.44 \text{to} 1.12 \mu \mathrm{m}$ thick rotated-Y LiTa03 (LT) plate and a near ST-cut quartz substrate was reported.
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Enhanced curie temperature and high heat resistivity of PMnN-PZT monocrystalline thin film on Si
TL;DR: In this paper, a c-axis-oriented PMnN-PZT monocrystalline thin film was sputterdeposited on a Si substrate covered with buffer layers.
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