Shoji Maruo
Yokohama National University
137 Papers
781 Citations
Shoji Maruo is an academic researcher from Yokohama National University. The author has contributed to research in topics: Microfabrication & Stereolithography. The author has an hindex of 23, co-authored 127 publications. Previous affiliations of Shoji Maruo include National Presto Industries & Nagoya University.
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Papers
NEW MICRO STEREO LITHOG FOR FREELY MOVABLE 3D MICRO - Super IH Process with Submicron Resolution -
Koji Ikuta,Shoji Maruo,Syunsuke Kojima +2 more
- 01 Jan 1998
TL;DR: In this article, the authors developed a drastically advanced micro stereo lithography named Super M process, which is the most unique feature of this process that liquid UV (Ultra Violet) polymer can be solidified at a pinpoint position in 3D space by optimizing apparatus and focusing condition of the laser beam.
Patent
Photoelectric driving micromachine and driving method of minute movable member
Shoji Maruo,Naoki Yoshimura,昭二 丸尾,直樹 吉村 +3 more
- 14 Sep 2009
TL;DR: In this paper, a micromachine has a structure such that a movable member is movably supported by a supporting member, and comprises a face constituted to hold fluid surrounding the movable members to be operated.
Simple autofocusing method by image processing for two-photon lithography
Taichi Furukawa,Yoko Fujishiro,Shoji Maruo +2 more
- 03 Aug 2020
TL;DR: A simple autofocusing method for two-photon lithography with an accuracy of sub-micron scale is proposed and mass-fabrication of spiral square structures is demonstrated.
Highly Deformable Optoelectronics Using Liquid Metal
Takashi Kozaki,Saito Satoshi,Yota Otsuki,Ryosuke Matsuda,Yutaka Isoda,Takuma Endo,Fumika Nakamura,Takuto Araki,Taichi Furukawa,Shoji Maruo,Masayoshi Watanabe,Kazuhide Ueno,Hiroki Ota +12 more
- 01 Jan 2020
TL;DR: In this paper, a photo-switchable ionic liquid and a liquid-state heterojunction was used to realize liquid state optoelectronics based on liquid metal and photo-switched ionic liquids.